Abstract

In the last years, modeling in diffractive optics have been of great interest due to increasing amount of applications of diffractive optical elements in many different optical areas [1]. As far as the analysis problem is of interest, originally-used scalar methods became inapplicable, and more complicated (i.e. rigorous) treatments had to be developed. Among several rigorous methods (integral, modal) for the analysis of diffraction characteristics of dielectric gratings proposed, the rigorous coupled-wave analysis (RCWA) has been employed the most since it is a deterministic, noniterative, relatively straightforward technique for obtaining the exact solution from the exact electromagnetic formulation [2].

© 1998 Optical Society of America