Abstract

Various fabrication methods have been investigated to manufacture refractive and diffractive micro-optical elements [1]. The structure of the elements is generated by holographic recording, optical lithography and direct writing (e-beam, laser beam). The pattern is then transferred into quartz by reactive ion etching (RIE), or replicated into plastic for low-cost mass production. Of special interest is the fabrication of hybrid elements, which combine the unique properties of diffractive optics (fan-out, high dispersion) with those of refractive optics (high numerical aperture, low dispersion). Therefore, we have studied different concepts for the manufacturing of hybrid (refractive/diffractive) elements and we present here some first results.

© 1998 Optical Society of America