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Conferences > CLEO_SI > 2023 > STu3J > STu3J.4

In situ Thermal Refractive Index Trimming of Silicon Nitride Waveguides with Suspended Heaters

Tianyuan Xue, Joyce K. S. Poon, and Wesley D. Sacher

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Abstract

We demonstrate low-power thermal refractive index trimming of silicon nitride waveguides using suspended heaters. An average effective index change of -2.6×10-3 was achieved at a wavelength of 1550 nm with a power dissipation of 40mW after 1.5 hours.

© 2023 The Author(s)

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