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Conferences > CLEO_SI > 2023 > SM2G > SM2G.6

Single-mode Integrated Out-of-plane Meta Beam Shaper for Optogenetics Neurostimulation

Hrishikesh T Iyer and Yurii Vlasov

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Abstract

We designed and experimentally demonstrated a single-mode out-of-plane beam shaper that merges functionalities of a grating and a metasurface within a 240nm silicon nitride layer that focuses 473nm light into a nearly diffraction-limited spot.

© 2023 The Author(s)

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