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Conferences > CLEO_SI > 2023 > SF1P > SF1P.4

Piezo-optomechanical Control of Silicon Photonic Resonator with CMOS Compatibility

Gina M. Talcott, Andrew J. Leenheer, Andrew Starbuck, Kate Musick, Andrew Pomerene, Christina Dallo, Douglas C. Trotter, Scott Madaras, Michael Gehl, Anthony L. Lentine, Matt Eichenfield, and Nils T. Otterstrom

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Abstract

We demonstrate piezo-optomechanical phase control in a c-band silicon-photonic resonator using CMOS-compatible AlN microactuators. We achieve a frequency tuning response of 26.91 ± 0.77 MHz/V DC, operating at picowatt to nanowatt power levels.

© 2023 The Author(s)

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