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Conferences > CLEO_SI > 2023 > SF1O > SF1O.4

Compact Echelle Grating Filter for Monolithic Silicon Photonics

Ahmed Abumazwed, Sujith Chandran, Yusheng Bian, Won Suk Lee, Jessica Zhang, Dan Deptuck, Michal Rakowski, Andy Stricker, Jae Gon Lee, and Ted Letavic

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Abstract

We present a miniaturized Echelle grating multiplexer in the O-band. The device was fabricated using GlobalFoundries-45CLO-process. Statistical analysis verifies the device manufacturability with a stable channel-center (standard deviation< 0.72nm), and crosstalk (<-20dB over 3dB-bandwidth).

© 2023 The Author(s)

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