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Conferences > CLEO_SI > 2022 > STh5F > STh5F.3

In-Situ Tuning of Optomechanical Crystals with Nano-Oxidation

Utku Hatipoglu, Sameer Sonar, and Oskar Painter

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Abstract

We present a method that employs nano-oxidation by an atomic-force microscope (AFM) to achieve in-situ, selective and simultaneous tuning of the optical and acoustic resonance frequencies of silicon optomechanical crystal cavities.

© 2022 The Author(s)

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