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Coated grazing incidence plate for XUV out-coupling of intracavity high harmonics from a thin-disk laser oscillator

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Abstract

We develop and implement a coated grazing-incidence-plate for broadband out-coupling of intracavity generated high-harmonics. We reach >25% XUV out-coupling efficiency resulting in 1.2-µW out-coupled average XUV power in a single harmonic at 37-eV and 17-MHz.

© 2022 The Author(s)

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