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Athermal WDM (de)multiplexer based on polysilicon cascaded Mach-Zehnder interferometers in bulk CMOS

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Abstract

We demonstrate an athermal WDM (de)multiplexer by realizing strip/subwavelength grating polysilicon waveguide based cascaded MZIs in bulk CMOS. Measured temperature sensitivity for all channels is around -20 pm/oC with a slope of -0.25 pm/oC/nm.

© 2021 The Author(s)

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