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Conferences > CLEO_SI > 2021 > STu4D > STu4D.7

Actuation bandwidth extension of an integrated piezo-optomechanical nanophotonic device

Anat Siddharth, Wenle Weng, Grigory Lihachev, Johann Riemensberger, Hao Tian, Junqiu Liu, Sunil A. Bhave, and Tobias J. Kippenberg

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Abstract

We demonstrate a novel technique of contour-mode suppression of an integrated MEMS-photonic chip up to the first HBAR mode at 17 MHz. The flattened actuation response is critical to the development of compact LiDAR engine or low-noise frequency-agile laser.

© 2021 The Author(s)

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