Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEO_SI > 2020 > SM4R > SM4R.2

High Q Microresonators Based on Epitaxial GaN Film

Yanzhen Zheng, Changzheng Sun, Bing Xiong, Lai Wang, Jian Wang, Yanjun Han, Zhibiao Hao, Hongtao Li, Jiadong Yu, and Yi Luo

Not Accessible

Your library or personal account may give you access

Abstract

High-Q GaN microring resonators are fabricated with optimized CH/BCF/Ar inductively coupled plasma (ICP) dry etching process. The GaN microresonator exhibits an intrinsic Q factor exceeding 2* 105, which is the highest Q reported so far.

© 2020 The Author(s)

PDF Article  |   Presentation Video
More Like This
Soliton Comb Generation in Air-Clad AlN Microresonators

Yanzhen Zheng, Changzheng Sun, Bing Xiong, Lai Wang, Jian Wang, Yanjun Han, Zhibiao Hao, Hongtao Li, Jiadong Yu, Yi Luo, Jianchang Yan, Tongbo Wei, Yun Zhang, and Junxi Wang
SW4J.3 CLEO: Science and Innovations (CLEO:S&I) 2020

High-Q Dispersion-Engineered Si3N4 Microresonators Based on a Subtractive Processing Technique

Zhichao Ye, Krishna Twayana, Peter A. Andrekson, and Victor Torres-Company
JTh2F.24 CLEO: Applications and Technology (CLEO:A&T) 2020

High Q AlN Ring Cavity with Wet Chemical Etching for Post-Treatment

Jia Liu, Xiang Ma, Shuai Wang, Hanling Long, Qiaoyin Lu, John Donegan, and Weihua Guo
M4A.236 Asia Communications and Photonics Conference (ACP) 2019

View More...

Presentation Video

Presentation video access is available to:

  1. Optica Publishing Group subscribers
  2. Technical meeting attendees
  3. Optica members who wish to use one of their free downloads. Please download the article first. After downloading, please refresh this page.

Contact your librarian or system administrator
or
Log in to access Optica Member Subscription or free downloads

More Like This
Soliton Comb Generation in Air-Clad AlN Microresonators

Yanzhen Zheng, Changzheng Sun, Bing Xiong, Lai Wang, Jian Wang, Yanjun Han, Zhibiao Hao, Hongtao Li, Jiadong Yu, Yi Luo, Jianchang Yan, Tongbo Wei, Yun Zhang, and Junxi Wang
SW4J.3 CLEO: Science and Innovations (CLEO:S&I) 2020

High-Q Dispersion-Engineered Si3N4 Microresonators Based on a Subtractive Processing Technique

Zhichao Ye, Krishna Twayana, Peter A. Andrekson, and Victor Torres-Company
JTh2F.24 CLEO: Applications and Technology (CLEO:A&T) 2020

High Q AlN Ring Cavity with Wet Chemical Etching for Post-Treatment

Jia Liu, Xiang Ma, Shuai Wang, Hanling Long, Qiaoyin Lu, John Donegan, and Weihua Guo
M4A.236 Asia Communications and Photonics Conference (ACP) 2019

View More...
High Q Gallium Nitride Microring Resonators

E. Stassen, M. Pu, E. Semenova, E. Zavarin, W. Lundin, and K. Yvind
CE_5_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2017

Single-mode tunable mid-IR laser based on a high-Q silicon microresonator

Euijae Shim, Andres Gil Molina, Ohad Westreich, Yamac Dikmelik, Kevin Lascola, Alexander L. Gaeta, and Michal Lipson
STh1E.2 CLEO: Science and Innovations (CLEO:S&I) 2020

Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use