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Conferences > CLEO_SI > 2017 > SM3K > SM3K.3

CMOS-Compatible ALD Zinc Oxide Coating for On-Chip Second-Order Nonlinear Optical Functionalities

Artur Hermans, Michiel Van Daele, Clemens Kieninger, Jolien Dendooven, Stéphane Clemmen, Christophe Detavernier, Christian Koos, and Roel Baets

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Abstract

We report on the atomic layer deposition of ZnO for interfacing with existing Si3N4 photonics which lacks 2nd-order nonlinear functionalities. We measure a χ(2) of 15 pm/V in line with a bulk ZnO crystal.

© 2017 Optical Society of America

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