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Conferences > CLEO_SI > 2016 > SF2P > SF2P.4

Vertically-Coupled Micro-Ring Resonator in Hydrogenated Amorphous Silicon

Duk-Yong Choi, Xin Gai, Barry Luther-Davies, and Jun Cheng

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Abstract

We demonstrated vertically coupled, hydrogenated amorphous silicon ring resonators by leveraging low temperature deposition of the material where SU-8 polymer was employed as planarization layer and resonator gap material.

© 2016 Optical Society of America

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