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Design and Fabrication of Vanadium Dioxide Metasurfaces for Continuous Optical Wavefront Tuning

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Abstract

We design and fabricate vanadium dioxide metasurfaces for dynamic optical amplitude, phase, and beam angle modulation. Temperature-dependent ellipsometry yields a refractive index modulation of ~1.8. Metasurface optical modulation of ~17 dB is projected with near π phase tuning.

© 2022 The Author(s)

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