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  • Conference on Lasers and Electro-Optics/Europe (CLEO/Europe 2023) and European Quantum Electronics Conference (EQEC 2023)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper ch_2_2

Metrology System Based on Metasurface Implementation of Artificial Inteligence

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Abstract

Optical instrumentation is ubiquitous across scientific disciplines and industrial settings for its ability to deliver non-destructive and high accuracy mesurements [1]. However, as global manufacturing transitions an automated industry paradigm, the need for highly integrated metrology systems for autonomous machines cannot be addressed traditional bulk optics based equipment [2]. Metasurfaces provide a possible solution to this challenge, enabling near-arbitrary light control functionality in a compact form factor [3–5].

© 2023 IEEE

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