Abstract

Terahertz (THz) quantum cascade lasers (QCLs) are compact sources of coherent THz radiation which can also operate as frequency combs [1], making them appealing for spectroscopy and sensing. We recently developed a new planarized THz QCL platform, where the active region waveguides are surrounded by a low-loss polymer (BCB). This enables fabricating an extended top metallization and placing bonding wires over the passive area on the sides (see Fig. 1a). We have shown that the planarized waveguide geometry improves the thermal, RF and dispersion properties, all crucial for frequency comb operation [2].

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