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Conferences > CLEO_Europe > 2021 > cm_9 > cm_9_1
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper cm_9_1

3D laser nanolithography of crystals

Airán Ródenas, Giacomo Corrielli, Petra Paiè, and Roberto Osellame

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Abstract

We will present details on how femtosecond pulse direct laser writing combined with wet etching can produce nanophotonic lattices with sufficiently well controlled feature sizes to develop a 3D nanolithography protocol.

© 2021 IEEE

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