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Conferences > CLEO_Europe > 2021 > ch_5 > ch_5_4
  • 2021 Conference on Lasers and Electro-Optics Europe and European Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 2021),
  • paper ch_5_4

Optical Coherence Microscopy for Integrated Photonics Devices Imaging

Maxim A. Sirotin, Maria N. Romodina, Evgeny V. Lyubin, Irina V. Soboleva, Vitalina V. Vigdorchik, Kirill R. Safronov, Daniil V. Akhremenkov, Vladimir O. Bessonov, and Andrey A. Fedyanin

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Abstract

We report on the development of a method for integrated photonics devices imaging based on phase-sensitive optical coherence microscopy. This method makes it possible to study the internal structure of devices and allows flaw detection.

© 2021 IEEE

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