Abstract

Nonlinear wavelength generations by using the optical waveguides are more compact, low cost, and efficient than using the traditional solid state systems [1], and the generated broadband light sources can be utilized in optical coherence tomography, frequency metrology, optical communications, and many other. In this work, the high quality of tantalum pentoxide (Ta2O5) micro-ring resonator has been fabricated to realize the low power parametric frequency conversion in the communication region. Figure 1 shows the illustration and scanning electron microscope (SEM) image of Ta2O5 based micro-ring resonator. The width/height of the ring waveguides is set as 1.5μm/0.7μm for the anomalous dispersion, which is a key element to minimize the phase mismatch in the parametric frequency conversion process. By fitting the transmission spectrum of the Ta2O5 ring resonator, the load quality factor is ~50000 and the loss coefficient is ~0.5cm−1. The unload quality factor is estimated to be ~180000, which is the best record of Ta2O5 based micro-ring resonator [2].

© 2017 IEEE

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