Abstract

Nonlinear wavelength generations by using the optical waveguides are more compact, low cost, and efficient than using the traditional solid state systems [1], and the generated broadband light sources can be utilized in optical coherence tomography, frequency metrology, optical communications, and many other. In this work, the high quality of tantalum pentoxide (Ta₂O₅) micro-ring resonator has been fabricated to realize the low power parametric frequency conversion in the communication region. Figure 1 shows the illustration and scanning electron microscope (SEM) image of Ta₂O₅ based micro-ring resonator. The width/height of the ring waveguides is set as 1.5μm/0.7μm for the anomalous dispersion, which is a key element to minimize the phase mismatch in the parametric frequency conversion process. By fitting the transmission spectrum of the Ta₂O₅ ring resonator, the load quality factor is ~50000 and the loss coefficient is ~0.5cm⁻¹. The unload quality factor is estimated to be ~180000, which is the best record of Ta₂O₅ based micro-ring resonator [2].

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