Abstract

Miniaturization and microstructures are keywords in the modern technical world. Optical components and systems are affected by this trend, too, which means that miniaturized optical lenses, prisms, gratings, and even artificial materials based on sub-wavelength structures have to be fabricated for a lot of applications. As a consequence, micro- and nano-lithography is challenged to realize complex optical elements, as well as artificial materials, both on the base of 2-D and 3-D microstructures. In order to fabricate such optical elements and materials, special demands on lithography or micro- and nano-machining arise from the wave nature of light. This refers to the accuracy as well as to special 2-D and 3-D fabrication techniques.

© 2007 IEEE