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Conferences > CLEO_Europe > 2000 > CTuO > CTuO5
  • Conference on Lasers and Electro-Optics Europe
  • Technical Digest Series (Optica Publishing Group, 2000),
  • paper CTuO5

Computer Aided Control of Laser Writing System for Fabricating Continuous-Relief Micro-Optical Elements

Y. C. Chan, C. Wang, C Y Liaw, and Y. L Lam

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Abstract

Direct laser writing is suitable for the fabrication of micro-optical elements with complex, non-spherical profiles that are difficult to fabricate by other techniques It is also a more cost-effective solution as compared to electron-beam writing, which requires a vacuum environment and has a small field of writing In such a laser writing system, the computer program plays an important role in controlling the various parameters to obtain the desired localized exposure.

© 2000 IEEE

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