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Mid-infrared 2-D Aperiodic Optical Phased Array in an InP-based Platform

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Abstract

We fabricate a 2-D aperiodic high-resolution optical phased array, which includes a multi-mode interferometer light-splitting tree, thermally isolated thermo-optic phase shifters, and total internal reflection mirror emitters in an InGaAs/InP platform for 2-D beam steering.

© 2023 The Author(s)

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