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Conferences > CLEO_AT > 2022 > JW3A > JW3A.35

Integration of single GaN micro-lenses with high index semiconductors by transfer printing

Nils Kolja Wessling, Saptarsi Ghosh, Benoit Guilhabert, Menno Kappers, Rachel A. Oliver, Martin D. Dawson, and Michael J. Strain

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Abstract

Suspended GaN micro-lenses are micro-transfer printed onto diamond to increase light-coupling efficiency. We demonstrate micro-lenses with 4 − 13 µm diameter, up to 3 µm height and r.m.s. surface roughness below 2 nm.

© 2022 The Author(s)

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