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Conferences > CLEO_AT > 2022 > AW5C > AW5C.2

Monolithic Integration of Si3N4 Ring Resonator and On-Chip Fourier Transform Spectrometer for The Lab-On-A-Chip Biosensor

Kyoung Min Yoo and Ray T. Chen

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Abstract

We demonstrated the monolithically integrated biosensor with micro-ring-resonator (MRR) and spatial-heterodyne Fourier-transform-spectrometer (SH-FTS) on Si3N4-on-SiO2, substituting the external optical spectrum analyzer. The spectrum is retrieved from SH-FTS with the bulk sensitivity of 42.9 nm/RIU.

© 2022 The Author(s)

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