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Conferences > CLEO_AT > 2022 > ATu4C > ATu4C.7

Black Silicon Photodetector with Broadband Spectral Photoresponsivity and High Gain by Ti-hyperdoping

Song Huang, Jinze Cao, Jiaxin Cao, Qiang Wu, Weiqing Gao, and Jingjun Xu

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Abstract

Ti-hyperdoped black silicon photodetector is prepared by femtosecond laser irradiation, which high comprehensive properties with broadband spectral photoresponsivity and high gain, showing great potential in high-performance imaging and large-scale optoelectronic integration.

© 2022 The Author(s)

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