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Erbium-doped Rare-Earth Oxide Thin Film Waveguides for Integrated Quantum Photonic Devices

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Abstract

We have developed a low-loss waveguide platform for erbium-doped rare-earth oxide thin films grown on silicon substrate and investigated optical properties of erbium ions in waveguides at cryogenic temperature, aiming for integrated quantum photonic devices.

© 2022 IEEE

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