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Conferences > CLEOPR > 2022 > CTuP5B > CTuP5B_03

Microfabrication using Laser-Induced Bubble (microFLIB) of thermoset polymer and its potential techniques

Yasutaka Hanada

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Abstract

We present microFabrication using Laser-Induced Bubble (microFLIB) of thermoset polymer PDMS. The fundamental characteristics of microFLIB reveals some advantages over the conventional laser direct writing techniques. We also discuss potential techniques of the microFLIB.

© 2022 IEEE

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