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Conferences > CLEOPR > 2022 > CTuA15D > CTuA15D_03

Widefield Heterodyne Optical Coherence Microscopy for Volumetric Vibration Imaging

Samuel Choi, Kaito Yoshimizu, Takeru Ota, Fumiaki Nin, Hiroshi Hibino, Shogo Muramatsu, and Takamasa Suzuki

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Abstract

We propose a method for simultaneous tomographic vibration visualization of an entire volume of a target object using a scanning low-coherence interferometric microscope. By combining the difference frequency component produced by the phase modulated reference beam and the object vibration into the time-domain OCT signal, we could capture the internal vibration distribution at a frequency of 43 kHz, which far exceeds the frame rate of the CMOS image sensor as a detector, with 25 nm sensitivity.

© 2022 IEEE

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