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Conferences > CLEOPR > 2022 > CThA17D > CThA17D_02

Single Si Layer Immersion Optical Ultrasound Sensor with Ultra-thin Opto-mechanical Membrane

Dong J. Choi, Sangwoo Nam, Dong U. Kim, Young J. Park, Man J. Her, Min G. Lim, Myung S. Hong, Hyeju Song, Jaesok Yu, and Sangyoon Han

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Abstract

We report on an optical ultrasound sensor with a 70 nm-thick opto-mechanical membrane. The device is made of a single silicon layer. The sensitivity and fractional bandwidth of the sensor are 0.41 μV/Pa and 62%, respectively.

© 2022 IEEE

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