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Nanoscale self-mixing interferometer based on multiple reflection and spectrum analysis algorithm

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Abstract

In this paper, a high precision self-mixing interferometer was proposed by combining multiple reflection technique with spectrum analysis algorithm (MR-SA). The interferometer has the ability to measure nanoscale amplitude. The relationship between amplitude, the dominant frequency and reflection times was deduced, which indicates that the theoretical precision is λ/3.8πG(N,θ). The experiments of different reflection times have been done to show good agreement with the theory.

© 2018 The Author(s)

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