Fabrication of 0.7μm2 Ridge Waveguide in Ion-Sliced LiNbO3 by Proton-Exchange Accelerated Etching

K. Tanaka; T. Suhara

2015 Conference on Lasers and Electro-Optics Pacific Rim
(Optica Publishing Group, 2015),
paper 26I1_5

Fabrication of 0.7μm² Ridge Waveguide in Ion-Sliced LiNbO₃ by Proton-Exchange Accelerated Etching

K. Tanaka and T. Suhara

Conference on Lasers and Electro-Optics/Pacific Rim 2015

Busan Republic of Korea
24–28 August 2015
ISBN: 978-1-4673-7110-0

From the session
Waveguides (26I1)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
K. Tanaka and T. Suhara, "Fabrication of 0.7μm2 Ridge Waveguide in Ion-Sliced LiNbO3 by Proton-Exchange Accelerated Etching," in 2015 Conference on Lasers and Electro-Optics Pacific Rim, (Optica Publishing Group, 2015), paper 26I1_5.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Save article

Abstract

We fabricated ridge waveguides in ion-sliced LiNbO₃ by accelerated chemical etching in the proton-exchanged region. We obtained the low-loss waveguides of 0.7 µm² cross-sectional area. Strongly confined guided modes were obtained at 1.55 µm wavelength.

PDF Article

More Like This

Proton Exchanged LiNbO3 Ridge Waveguide Fabricated by Wet Etching Process

Hyung-Jae Lee and Sang-Yung Shin
IThG25 Integrated Photonics Research (IPR) 1995

Low-loss pre-patterned annealed proton exchanged optical circuits in ion-sliced single-crystal thin films of LiNbO3

A. M. Radojevic, R. M. Osgood, A. N. Roy, and H. Bakhru
IWB2 Integrated Photonics Research (IPR) 2001

New proton-exchange technique for LiNbO3 waveguide fabrication

K. YAMAMOTO and T. TANIUCHI
TUH2 Optical Fiber Communication Conference (OFC) 1987

Previous Article Next Article