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Conferences > CLEOPR > 2001 > TuG1 > TuG1_3
  • The 4th Pacific Rim Conference on Lasers and Electro-Optics
  • Technical Digest Series (Optica Publishing Group, 2001),
  • paper TuG1_3

Spectral interferometric technique for 3D-shape measurement of microscopic objects with improved resolution, speed of measurement and signal processing

D. S. Mehta, M. Sugai, H. Hinosugi, S. Saito, M. Takeda, T. Kurokawa, H. Takahashi, M. Ando, M. Shishido, and T. Yoshizawa

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Abstract

A spectral interference microscope using superluminescent diode as light source and a liquid-crystal Fabry-Perot etalon as a frequency tunable device is developed for three-dimensional imaging micro-profilometry. By changing the current to the superluminescent diode the constant light input to the interferometer was achieved throughout the measurement. A high speed Fourier transform technique was developed for the analysis of the data which takes few seconds to measure the three-dimensional absolute height distribution of a discontinuous object. Experimental results with improved resolution and speed of measurement are presented.

© 2001 IEEE

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