Microstructure on Titanium Oxide and Silicon Nitride formed by KrF Excimer Laser Ablation

Tomoyuki Shimoda; Kosuke Takahashi; Minoru Obara

The 4th Pacific Rim Conference on Lasers and Electro-Optics
Technical Digest Series (Optica Publishing Group, 2001),
paper MB1_2

Microstructure on Titanium Oxide and Silicon Nitride formed by KrF Excimer Laser Ablation

Tomoyuki Shimoda, Kosuke Takahashi, and Minoru Obara

Conference on Lasers and Electro-Optics/Pacific Rim 2001

Chiba Japan
15–19 July 2001
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Fundamental Aspects [Room B] (MB1)

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T. Shimoda, K. Takahashi, and M. Obara, "Microstructure on Titanium Oxide and Silicon Nitride formed by KrF Excimer Laser Ablation," in The 4th Pacific Rim Conference on Lasers and Electro-Optics, Technical Digest Series (Optica Publishing Group, 2001), paper MB1_2.

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Abstract

We have created conical microstructures on sintered flat TiO₂ and Si₃N₄ by near-threshold KrF laser ablation. The surface morphology and the chemical composition were analyzed with SEM and XPS, respectively.

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