Abstract

The pulsed-laser deposition (PLD) is recognized as a powerful method to deposit high-quality thin films, like high-Tc superconducting oxides. Due to the nature of PLD that the behavior of particles ejected from the target is quite dynamic in time and space, multi-dimensional or imaging measurement is essential for the full understanding of the process.¹ In this paper, two-dimensional laser-induced fluorescence technique has been utilized to visualize the density distributions of the non-emissive species in the PLD process of YBa₂Cu₃O_7–x, (YBCO), which are thought to be the major constituents in this process.

© 1995 IEEE