Analysis of debris produced by laser ablation of polyimide

Shigeki Matsunaka; Naotada Okada; Shinichi Imai

The Pacific Rim Conference on Lasers and Electro-Optics
Technical Digest Series (Optica Publishing Group, 1995),
paper FH2

Analysis of debris produced by laser ablation of polyimide

Shigeki Matsunaka, Naotada Okada, and Shinichi Imai

Conference on Lasers and Electro-Optics/Pacific Rim 1995

Chiba Japan
10–14 July 1995
ISBN:

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Laser Chemistry, Materials Processing and industrial Applications IV (FH)

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S. Matsunaka, N. Okada, and S. Imai, "Analysis of debris produced by laser ablation of polyimide," in The Pacific Rim Conference on Lasers and Electro-Optics, Technical Digest Series (Optica Publishing Group, 1995), paper FH2.

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Abstract

Ablation of polyimide has extensively been studied using excimer lasers or TEA-CO₂ lasers tuned to the infrared absorption wavelength (9.2 μm) for polyimide.^1,2

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