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Conferences > CLEO > 2007 > JThD > JThD92
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper JThD92

Temperature Dependence of Ultrafast Laser Ablation Efficiency of Crystalline Silicon

J. S. Yahng and S. C. Jeoung

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Abstract

Ultrafast laser ablation of crystalline silicon was investigated as a function of temperature. The ablation efficiency is slightly enhanced with an apparent decrease in ablation threshold and surface roughness at a high substrate temperature.

© 2007 Optical Society of America

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