We present an integrated microsensor for time-domain analysis of spectral coherence, with a tunable coherence detection range. The 0.2 cm3 device includes a partially transmitting GaAs/AlGaAs photodiode and a large-displacement scanning Si MEMS mirror.

© 2003 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription