Application of light-optical measurement system with CCD sensor for dimensional measurements

Liana Leonova; Werner Mirandé

doi:10.1364/BIO.1999.ATuC5

Biomedical Optics
OSA Technical Digest (Optica Publishing Group, 1999),
paper ATuC5
•https://doi.org/10.1364/BIO.1999.ATuC5

Application of light-optical measurement system with CCD sensor for dimensional measurements

Liana Leonova and Werner Mirandé

Biomedical Topical Meeting 1999

Munich Germany
ISBN: 1-55752-584-6

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Poster Session (ATuC)

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L. Leonova and W. Mirandé, "Application of light-optical measurement system with CCD sensor for dimensional measurements," in Biomedical Optics, OSA Technical Digest (Optica Publishing Group, 1999), paper ATuC5.

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Abstract

Dimensional measurements of various microstructures with arbitrary geometric forms are of great importance for different branches of science and industry to require often a high degree of precision. Charge-Coupled Devices (CCD) find wide application for this kind of measurement tasks.

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