We demonstrated the fabrication of buried optical waveguides, Bragg grating waveguides and single NV centers in diamond using focused femtosecond laser pulses. We applied polarized Raman spectroscopy to gain insight into the stress-formed optical waveguides. We found that the optical mode is confined in the horizontal direction by the two laser-written lines, whereas in the vertical direction it is confined by the stress-induced refractive index change. An integrated waveguide-NV device was laser-fabricated, showing potential for optical magnetometry and quantum information applications.
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