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Recent Advances in Plasma Diagnostics Using Mid-Infrared Optical Frequency Comb Spectroscopy

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Abstract

We present our recent progress in plasma diagnostics using two mid-infrared comb-based spectrometers: (I) Fourier transform spectroscopy and (II) virtually imaged phased array spectroscopy. The high-resolution spectra of molecules generated in N2-H2-CH4 plasmas are measured.

© 2023 The Author(s)

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