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Conferences > AIS > 2023 > AW3A > AW3A.3

Highly sensitive MEMS for photoacoustic gas sensing

Tarek Seoudi, Julien Charensol, Wioletta Trzpil, Fanny Pages, Diba Ayache, Roman Rousseau, Aurore Vicet, and Michael Bahriz

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Abstract

An enhanced MEMS capacitive sensor is developed for photoacoustic gas detection. Without an acoustic cavity, the MEMS exhibits superior performance to bare Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS), a state-of-the-art reference to compact and selective gas sensors.

© 2023 The Author(s)

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