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Conferences > ACPC > 2021 > T1D > T1D.4

High-performance waveguide Ge/Si avalanche photodiode with simplified fabrication processes

Yuluan Xiang, Hengzhen Cao, Chaoyue Liu, and Daoxin Dai

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Abstract

A high-performance waveguide Ge/Si avalanche photodiode is designed and fabricated with simplified processes, showing a high primary responsivity of 0.96 A/W, a 3dB bandwidth of 27 GHz. A 50 Gbps data transmission is also demonstrated.

© 2021 The Author(s)

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