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Conferences > 3D > 2023 > JTu4A > JTu4A.21

Measurement of complex wave fields emanating from a phase-type spatial light modulator for the estimation of lithographic holograms

Yongjun Lim, Myeong-Gyu Choi, Kwan-Jung Oh, and Hwi Kim

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Abstract

Computational techniques related to computer-generated holograms are highly improved leading to improved holographic image quality and greater flexibility. We propose a quality assessment method of CGHs for lithographic holograms by the wavefront measurement.

© 2023 The Author(s)

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