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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Europe (CLEO/Europe 2023) and European Quantum Electronics Conference (EQEC 2023)
  • Technical Digest Series (Optica Publishing Group, 2023),
  • paper ce_11_3

Shape Correction of Glass Using Femtosecond Lasers

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For laser-based optical fabrication, surface roughness can be reduced efficiently with laser polishing. However, it remains challenging to smooth the residual waviness and shape errors [1,2]. Compared to continuous-wave and longer-pulse lasers, femtosecond (fs) laser processing enables high-precision material removal without inducing thermal melting. We present fs-laser-based shape correction. The material removal as a function of energy deposition was used to select sets of optimal laser parameters for high-precision figuring and smoothing glass substrates.

© 2023 IEEE

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