Abstract

Narrowband microwave photonic filters based on a microring resonator are difficult to achieve because low cavity loss and low coupling loss should be satisfied simultaneously. Here, a high Q (∼2.6×106) multimode microring resonator is proposed to achieve an ultra-narrow band tunable microwave photonic filter. Combining the ultra-low loss of the silicon nitride waveguide and the ultra-low coupling coefficients of the multimode ring resonator, very narrow optical bandwidths between 72.5 MHz to 275 MHz were obtained for different order modes, which match the simulation results well. Furthermore, by introducing the two switchable modulation methods supported by the dual-drive Mach–Zehnder modulator, we achieved a narrowband passband/stopband switchable microwave photonic filter, whose 3 dB bandwidths are 180 MHz and 120 MHz, respectively. The filter frequency can be tuned from 2 ∼ 18 GHz by altering the laser wavelength, and a high out of band RF rejection ratio about 27 dB was obtained for the passband filter due to the high-quality factor. Besides, a high RF rejection ratio of about 51 dB was achieved for the stopband filter by using the RF cancellation technology.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
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    [Crossref]
  29. P. Zheng, H. Hong, J. Li, G. Hu, B. Yun, and Y. Cui, “Performances of Microwave Photonic Notch Filter Based on Microring Resonator with Dual-Drive Modulator,” IEEE Photonics J. 11(1), 1–13 (2019).
    [Crossref]
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  31. Y. Liu, J. Hotten, A. Choudhary, B. J. Eggleton, and D. Marpaung, “All-optimized integrated RF photonic notch filter,” Opt. Lett. 42(22), 4631–4634 (2017).
    [Crossref]

2020 (2)

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

L. Zhang, L. Jie, M. Zhang, Y. Wang, Y. Xie, Y. Shi, and D. Dai, “Ultra-high-Q Silicon Race-track Resonators,” Photonics Res. 8(5), 684–689 (2020).
[Crossref]

2019 (4)

P. Zheng, H. Hong, J. Li, G. Hu, B. Yun, and Y. Cui, “Performances of Microwave Photonic Notch Filter Based on Microring Resonator with Dual-Drive Modulator,” IEEE Photonics J. 11(1), 1–13 (2019).
[Crossref]

J. li, Z. Liu, Q. Geng, S. Yang, H. Chen, and M. Chen, “Method for suppressing the frequency drift of integrated microwave photonic filters,” Opt. Express 27(23), 33575–33585 (2019).
[Crossref]

Z. Zhu, Y. Liu, M. Merklein, O. Daulay, D. Marpaung, and B. J. Eggleton, “Positive link gain microwave photonic bandpass filter using Si3N4-ring-enabled sideband filtering and carrier suppression,” Opt. Express 27(22), 31727–31740 (2019).
[Crossref]

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

2018 (3)

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon Nitride in Silicon Photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Y. Zhang, X. Hu, D. Chen, L. Wang, M. Li, P. Feng, X. Xiao, and S. Yu, “Design and demonstration of ultra-high-Q silicon microring resonator based on a multi-mode ridge waveguide,” Opt. Lett. 43(7), 1586–1589 (2018).
[Crossref]

2017 (3)

Y. Liu, J. Hotten, A. Choudhary, B. J. Eggleton, and D. Marpaung, “All-optimized integrated RF photonic notch filter,” Opt. Lett. 42(22), 4631–4634 (2017).
[Crossref]

T. Hu, B. Dong, X. Luo, T. Liow, J. Song, C. Lee, and G. Lo, “Silicon photonic platforms for mid-infrared Applications,” Photonics Res. 5(5), 417–430 (2017).
[Crossref]

P. M. Fok and J. Ge, “Tunable Multiband Microwave Photonic Filters,” Photonics 4(4), 45 (2017).
[Crossref]

2016 (5)

2015 (1)

2014 (2)

2013 (2)

Z. Zhang, B. Huang Z, Z. C. Cheng, and H. Chen, “Microwave photonic filter with reconfigurable and tunable bandpass response using integrated optical signal processor based on microring resonator,” Opt. Eng. 52(12), 127102 (2013).
[Crossref]

D. Marpaung, B. Morrison, R. Pant, C. Roeloffzen, A. Leinse, M. Hoekman, R. Heideman, and B. J. Eggleton, “Si3N4 ring resonator-based microwave photonic notch filter with an ultrahigh peak rejection,” Opt. Express 21(20), 23286–23294 (2013).
[Crossref]

2012 (2)

W. Bogaerts, P. D. Heyn, T. V. Vaerenbergh, K. DeVos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. V. Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

W. Zhang and R. A. Minasian, “Switchable and Tunable Microwave Photonic Brillouin-Based Filter,” IEEE Photonics J. 4(5), 1443–1455 (2012).
[Crossref]

2011 (2)

2008 (1)

W. Hoving, R. Heideman, D. Geuzebroek, A. Leinse, E. Klein, and R. Dekkera, “Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing,” Proc. SPIE 6996, 699612 (2008).
[Crossref]

2007 (1)

J. Capmany and D. Novak, “Microwave photonics combines two worlds,” Nat. Photonics 1(6), 319–330 (2007).
[Crossref]

2004 (1)

R. Hernandez, A. Loayssa, and D. Benito, “Optical vector network analysis based on single-sideband modulation,” Opt. Eng. 43(10), 2418 (2004).
[Crossref]

Alippi, A.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Azaña, J.

M. Burla, B. Crockett, L. Chrostowski, and J. Azaña, “Ultra-high Q Multimode Waveguide Ring Resonators for Microwave Photonics Signal Processing,” in International Topical Meeting on Microwave Photonics, (2015).

Baets, R.

W. Bogaerts, P. D. Heyn, T. V. Vaerenbergh, K. DeVos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. V. Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Bauters, J. F.

Bedoya, A. C.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

Benelajla, M.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Benito, D.

R. Hernandez, A. Loayssa, and D. Benito, “Optical vector network analysis based on single-sideband modulation,” Opt. Eng. 43(10), 2418 (2004).
[Crossref]

Bienstman, P.

W. Bogaerts, P. D. Heyn, T. V. Vaerenbergh, K. DeVos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. V. Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Blumenthal, D. J.

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon Nitride in Silicon Photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

M. Tien, J. F. Bauters, M. J. R. Heck, D. T. Spencer, D. J. Blumenthal, and J. E. Bowers, “Ultra-high quality factor planar Si3N4 ring resonators on Si substrates,” Opt. Express 19(14), 13551–13556 (2011).
[Crossref]

Bogaerts, W.

W. Bogaerts, P. D. Heyn, T. V. Vaerenbergh, K. DeVos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. V. Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Boller, K. J.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Bouwmeester, D.

Bowers, J. E.

Burla, M.

M. Burla, B. Crockett, L. Chrostowski, and J. Azaña, “Ultra-high Q Multimode Waveguide Ring Resonators for Microwave Photonics Signal Processing,” in International Topical Meeting on Microwave Photonics, (2015).

Capmany, J.

Chen, D.

Chen, H.

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

J. li, Z. Liu, Q. Geng, S. Yang, H. Chen, and M. Chen, “Method for suppressing the frequency drift of integrated microwave photonic filters,” Opt. Express 27(23), 33575–33585 (2019).
[Crossref]

H. Yu, M. Chen, Q. Guo, M. Hoekman, H. Chen, A. Leinse, R. G. Heideman, R. Mateman, S. Yang, and S. Xie, “All-Optical Full-Band RF Receiver Based on an Integrated Ultra-High-Q Bandpass Filter,” J. Lightwave Technol. 34(2), 701–706 (2016).
[Crossref]

Z. Zhang, B. Huang Z, Z. C. Cheng, and H. Chen, “Microwave photonic filter with reconfigurable and tunable bandpass response using integrated optical signal processor based on microring resonator,” Opt. Eng. 52(12), 127102 (2013).
[Crossref]

Chen, M.

Chen, R.

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

Cheng, C.

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

Cheng, Y.

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

Cheng, Z. C.

Z. Zhang, B. Huang Z, Z. C. Cheng, and H. Chen, “Microwave photonic filter with reconfigurable and tunable bandpass response using integrated optical signal processor based on microring resonator,” Opt. Eng. 52(12), 127102 (2013).
[Crossref]

Choi, D.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

Choudhary, A.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

Y. Liu, J. Hotten, A. Choudhary, B. J. Eggleton, and D. Marpaung, “All-optimized integrated RF photonic notch filter,” Opt. Lett. 42(22), 4631–4634 (2017).
[Crossref]

Y. Liu, D. Marpaung, A. Choudhary, and B. J. Eggleton, “Lossless and high-resolution RF photonic notch filter,” Opt. Lett. 41(22), 5306 (2016).
[Crossref]

Chrostowski, L.

M. Burla, B. Crockett, L. Chrostowski, and J. Azaña, “Ultra-high Q Multimode Waveguide Ring Resonators for Microwave Photonics Signal Processing,” in International Topical Meeting on Microwave Photonics, (2015).

Claes, T.

W. Bogaerts, P. D. Heyn, T. V. Vaerenbergh, K. DeVos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. V. Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Coldren, L. A.

W. Liu, M. Li, R. S. Guzzon, E. J. Norberg, J. S. Parker, M. Lu, L. A. Coldren, and J. Yao, “A fully reconfigurable photonic integrated signal processor,” Nat. Photonics 10(3), 190–195 (2016).
[Crossref]

Crockett, B.

M. Burla, B. Crockett, L. Chrostowski, and J. Azaña, “Ultra-high Q Multimode Waveguide Ring Resonators for Microwave Photonics Signal Processing,” in International Topical Meeting on Microwave Photonics, (2015).

Cui, Y.

P. Zheng, H. Hong, J. Li, G. Hu, B. Yun, and Y. Cui, “Performances of Microwave Photonic Notch Filter Based on Microring Resonator with Dual-Drive Modulator,” IEEE Photonics J. 11(1), 1–13 (2019).
[Crossref]

Dai, D.

L. Zhang, L. Jie, M. Zhang, Y. Wang, Y. Xie, Y. Shi, and D. Dai, “Ultra-high-Q Silicon Race-track Resonators,” Photonics Res. 8(5), 684–689 (2020).
[Crossref]

Dale, E.

A. Savchenkov, V. Ilchenko, E. Dale, D. Seidel, A. Matsko, and L. Maleki, “Agile High-Q RF Photonic Zooming Filter,” IEEE Photonics Technol. Lett. 28(1), 43–46 (2016).
[Crossref]

Daulay, O.

de Dood, M. J. A.

Dekker, R.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Dekkera, R.

W. Hoving, R. Heideman, D. Geuzebroek, A. Leinse, E. Klein, and R. Dekkera, “Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing,” Proc. SPIE 6996, 699612 (2008).
[Crossref]

DeVos, K.

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C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
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C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
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C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
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W. Hoving, R. Heideman, D. Geuzebroek, A. Leinse, E. Klein, and R. Dekkera, “Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing,” Proc. SPIE 6996, 699612 (2008).
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C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
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Guzzon, R. S.

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D. Marpaung, B. Morrison, R. Pant, C. Roeloffzen, A. Leinse, M. Hoekman, R. Heideman, and B. J. Eggleton, “Si3N4 ring resonator-based microwave photonic notch filter with an ultrahigh peak rejection,” Opt. Express 21(20), 23286–23294 (2013).
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W. Hoving, R. Heideman, D. Geuzebroek, A. Leinse, E. Klein, and R. Dekkera, “Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing,” Proc. SPIE 6996, 699612 (2008).
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C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
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H. Yu, M. Chen, Q. Guo, M. Hoekman, H. Chen, A. Leinse, R. G. Heideman, R. Mateman, S. Yang, and S. Xie, “All-Optical Full-Band RF Receiver Based on an Integrated Ultra-High-Q Bandpass Filter,” J. Lightwave Technol. 34(2), 701–706 (2016).
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C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
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H. Yu, M. Chen, Q. Guo, M. Hoekman, H. Chen, A. Leinse, R. G. Heideman, R. Mateman, S. Yang, and S. Xie, “All-Optical Full-Band RF Receiver Based on an Integrated Ultra-High-Q Bandpass Filter,” J. Lightwave Technol. 34(2), 701–706 (2016).
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D. Marpaung, B. Morrison, R. Pant, C. Roeloffzen, A. Leinse, M. Hoekman, R. Heideman, and B. J. Eggleton, “Si3N4 ring resonator-based microwave photonic notch filter with an ultrahigh peak rejection,” Opt. Express 21(20), 23286–23294 (2013).
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P. Zheng, H. Hong, J. Li, G. Hu, B. Yun, and Y. Cui, “Performances of Microwave Photonic Notch Filter Based on Microring Resonator with Dual-Drive Modulator,” IEEE Photonics J. 11(1), 1–13 (2019).
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Hoving, W.

W. Hoving, R. Heideman, D. Geuzebroek, A. Leinse, E. Klein, and R. Dekkera, “Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing,” Proc. SPIE 6996, 699612 (2008).
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P. Zheng, H. Hong, J. Li, G. Hu, B. Yun, and Y. Cui, “Performances of Microwave Photonic Notch Filter Based on Microring Resonator with Dual-Drive Modulator,” IEEE Photonics J. 11(1), 1–13 (2019).
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Hu, T.

T. Hu, B. Dong, X. Luo, T. Liow, J. Song, C. Lee, and G. Lo, “Silicon photonic platforms for mid-infrared Applications,” Photonics Res. 5(5), 417–430 (2017).
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Huang, B.

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Z. Zhang, B. Huang Z, Z. C. Cheng, and H. Chen, “Microwave photonic filter with reconfigurable and tunable bandpass response using integrated optical signal processor based on microring resonator,” Opt. Eng. 52(12), 127102 (2013).
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W. Hoving, R. Heideman, D. Geuzebroek, A. Leinse, E. Klein, and R. Dekkera, “Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing,” Proc. SPIE 6996, 699612 (2008).
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Klein, E. J.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
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T. Hu, B. Dong, X. Luo, T. Liow, J. Song, C. Lee, and G. Lo, “Silicon photonic platforms for mid-infrared Applications,” Photonics Res. 5(5), 417–430 (2017).
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D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon Nitride in Silicon Photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

H. Yu, M. Chen, Q. Guo, M. Hoekman, H. Chen, A. Leinse, R. G. Heideman, R. Mateman, S. Yang, and S. Xie, “All-Optical Full-Band RF Receiver Based on an Integrated Ultra-High-Q Bandpass Filter,” J. Lightwave Technol. 34(2), 701–706 (2016).
[Crossref]

D. Marpaung, B. Morrison, R. Pant, C. Roeloffzen, A. Leinse, M. Hoekman, R. Heideman, and B. J. Eggleton, “Si3N4 ring resonator-based microwave photonic notch filter with an ultrahigh peak rejection,” Opt. Express 21(20), 23286–23294 (2013).
[Crossref]

W. Hoving, R. Heideman, D. Geuzebroek, A. Leinse, E. Klein, and R. Dekkera, “Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing,” Proc. SPIE 6996, 699612 (2008).
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J. li, Z. Liu, Q. Geng, S. Yang, H. Chen, and M. Chen, “Method for suppressing the frequency drift of integrated microwave photonic filters,” Opt. Express 27(23), 33575–33585 (2019).
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P. Zheng, H. Hong, J. Li, G. Hu, B. Yun, and Y. Cui, “Performances of Microwave Photonic Notch Filter Based on Microring Resonator with Dual-Drive Modulator,” IEEE Photonics J. 11(1), 1–13 (2019).
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Y. Zhang, X. Hu, D. Chen, L. Wang, M. Li, P. Feng, X. Xiao, and S. Yu, “Design and demonstration of ultra-high-Q silicon microring resonator based on a multi-mode ridge waveguide,” Opt. Lett. 43(7), 1586–1589 (2018).
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W. Liu, M. Li, R. S. Guzzon, E. J. Norberg, J. S. Parker, M. Lu, L. A. Coldren, and J. Yao, “A fully reconfigurable photonic integrated signal processor,” Nat. Photonics 10(3), 190–195 (2016).
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Liow, T.

T. Hu, B. Dong, X. Luo, T. Liow, J. Song, C. Lee, and G. Lo, “Silicon photonic platforms for mid-infrared Applications,” Photonics Res. 5(5), 417–430 (2017).
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Liu, W.

W. Liu, M. Li, R. S. Guzzon, E. J. Norberg, J. S. Parker, M. Lu, L. A. Coldren, and J. Yao, “A fully reconfigurable photonic integrated signal processor,” Nat. Photonics 10(3), 190–195 (2016).
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Liu, Y.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
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Z. Zhu, Y. Liu, M. Merklein, O. Daulay, D. Marpaung, and B. J. Eggleton, “Positive link gain microwave photonic bandpass filter using Si3N4-ring-enabled sideband filtering and carrier suppression,” Opt. Express 27(22), 31727–31740 (2019).
[Crossref]

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Y. Liu, J. Hotten, A. Choudhary, B. J. Eggleton, and D. Marpaung, “All-optimized integrated RF photonic notch filter,” Opt. Lett. 42(22), 4631–4634 (2017).
[Crossref]

Y. Liu, D. Marpaung, A. Choudhary, and B. J. Eggleton, “Lossless and high-resolution RF photonic notch filter,” Opt. Lett. 41(22), 5306 (2016).
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Y. Liu, Y. Yu, S. Yuan, X. Xu, and X. Zhang, “Tunable megahertz bandwidth microwave photonic notch filter based on a silica microsphere cavity,” Opt. Lett. 41(21), 5078–5081 (2016).
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Liu, Z.

Lloret, J.

Lo, G.

T. Hu, B. Dong, X. Luo, T. Liow, J. Song, C. Lee, and G. Lo, “Silicon photonic platforms for mid-infrared Applications,” Photonics Res. 5(5), 417–430 (2017).
[Crossref]

Loayssa, A.

R. Hernandez, A. Loayssa, and D. Benito, “Optical vector network analysis based on single-sideband modulation,” Opt. Eng. 43(10), 2418 (2004).
[Crossref]

Lu, M.

W. Liu, M. Li, R. S. Guzzon, E. J. Norberg, J. S. Parker, M. Lu, L. A. Coldren, and J. Yao, “A fully reconfigurable photonic integrated signal processor,” Nat. Photonics 10(3), 190–195 (2016).
[Crossref]

Luo, X.

T. Hu, B. Dong, X. Luo, T. Liow, J. Song, C. Lee, and G. Lo, “Silicon photonic platforms for mid-infrared Applications,” Photonics Res. 5(5), 417–430 (2017).
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Ma, P.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
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Madden, S. J.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
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Maleki, L.

A. Savchenkov, V. Ilchenko, E. Dale, D. Seidel, A. Matsko, and L. Maleki, “Agile High-Q RF Photonic Zooming Filter,” IEEE Photonics Technol. Lett. 28(1), 43–46 (2016).
[Crossref]

Marchenko, D.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Marpaung, D.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

Z. Zhu, Y. Liu, M. Merklein, O. Daulay, D. Marpaung, and B. J. Eggleton, “Positive link gain microwave photonic bandpass filter using Si3N4-ring-enabled sideband filtering and carrier suppression,” Opt. Express 27(22), 31727–31740 (2019).
[Crossref]

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Y. Liu, J. Hotten, A. Choudhary, B. J. Eggleton, and D. Marpaung, “All-optimized integrated RF photonic notch filter,” Opt. Lett. 42(22), 4631–4634 (2017).
[Crossref]

Y. Liu, D. Marpaung, A. Choudhary, and B. J. Eggleton, “Lossless and high-resolution RF photonic notch filter,” Opt. Lett. 41(22), 5306 (2016).
[Crossref]

D. Marpaung, B. Morrison, R. Pant, C. Roeloffzen, A. Leinse, M. Hoekman, R. Heideman, and B. J. Eggleton, “Si3N4 ring resonator-based microwave photonic notch filter with an ultrahigh peak rejection,” Opt. Express 21(20), 23286–23294 (2013).
[Crossref]

Mateman, R.

Matsko, A.

A. Savchenkov, V. Ilchenko, E. Dale, D. Seidel, A. Matsko, and L. Maleki, “Agile High-Q RF Photonic Zooming Filter,” IEEE Photonics Technol. Lett. 28(1), 43–46 (2016).
[Crossref]

Merklein, M.

Minasian, R. A.

W. Zhang and R. A. Minasian, “Switchable and Tunable Microwave Photonic Brillouin-Based Filter,” IEEE Photonics J. 4(5), 1443–1455 (2012).
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Mitchell, A.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

Morrison, B.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

D. Marpaung, B. Morrison, R. Pant, C. Roeloffzen, A. Leinse, M. Hoekman, R. Heideman, and B. J. Eggleton, “Si3N4 ring resonator-based microwave photonic notch filter with an ultrahigh peak rejection,” Opt. Express 21(20), 23286–23294 (2013).
[Crossref]

Nguyen, T. G.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

Norberg, E. J.

W. Liu, M. Li, R. S. Guzzon, E. J. Norberg, J. S. Parker, M. Lu, L. A. Coldren, and J. Yao, “A fully reconfigurable photonic integrated signal processor,” Nat. Photonics 10(3), 190–195 (2016).
[Crossref]

Novak, D.

J. Capmany and D. Novak, “Microwave photonics combines two worlds,” Nat. Photonics 1(6), 319–330 (2007).
[Crossref]

Oldenbeuving, R. M.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Pant, R.

Parker, J. S.

W. Liu, M. Li, R. S. Guzzon, E. J. Norberg, J. S. Parker, M. Lu, L. A. Coldren, and J. Yao, “A fully reconfigurable photonic integrated signal processor,” Nat. Photonics 10(3), 190–195 (2016).
[Crossref]

Pu, M.

Rees, A. V.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Ren, G.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

Roeloffzen, C.

Roeloffzen, C. G. H.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Sales, S.

Sancho, J.

Savchenkov, A.

A. Savchenkov, V. Ilchenko, E. Dale, D. Seidel, A. Matsko, and L. Maleki, “Agile High-Q RF Photonic Zooming Filter,” IEEE Photonics Technol. Lett. 28(1), 43–46 (2016).
[Crossref]

Schreuder, E.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Seidel, D.

A. Savchenkov, V. Ilchenko, E. Dale, D. Seidel, A. Matsko, and L. Maleki, “Agile High-Q RF Photonic Zooming Filter,” IEEE Photonics Technol. Lett. 28(1), 43–46 (2016).
[Crossref]

Selvaraja, S. K.

W. Bogaerts, P. D. Heyn, T. V. Vaerenbergh, K. DeVos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. V. Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Shi, Y.

L. Zhang, L. Jie, M. Zhang, Y. Wang, Y. Xie, Y. Shi, and D. Dai, “Ultra-high-Q Silicon Race-track Resonators,” Photonics Res. 8(5), 684–689 (2020).
[Crossref]

Song, J.

T. Hu, B. Dong, X. Luo, T. Liow, J. Song, C. Lee, and G. Lo, “Silicon photonic platforms for mid-infrared Applications,” Photonics Res. 5(5), 417–430 (2017).
[Crossref]

Spencer, D. T.

Taballione, C.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Taddei, C.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Thourhout, D. V.

W. Bogaerts, P. D. Heyn, T. V. Vaerenbergh, K. DeVos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. V. Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Tien, M.

Timens, R. B.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Vaerenbergh, T. V.

W. Bogaerts, P. D. Heyn, T. V. Vaerenbergh, K. DeVos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. V. Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Visscher, I.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Vu, K.

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

Wang, L.

Wang, Y.

L. Zhang, L. Jie, M. Zhang, Y. Wang, Y. Xie, Y. Shi, and D. Dai, “Ultra-high-Q Silicon Race-track Resonators,” Photonics Res. 8(5), 684–689 (2020).
[Crossref]

Wevers, L. S.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Worhoff, K.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

Xiao, X.

Xie, S.

Xie, Y.

L. Zhang, L. Jie, M. Zhang, Y. Wang, Y. Xie, Y. Shi, and D. Dai, “Ultra-high-Q Silicon Race-track Resonators,” Photonics Res. 8(5), 684–689 (2020).
[Crossref]

Xu, X.

Yang, S.

Yao, J.

W. Liu, M. Li, R. S. Guzzon, E. J. Norberg, J. S. Parker, M. Lu, L. A. Coldren, and J. Yao, “A fully reconfigurable photonic integrated signal processor,” Nat. Photonics 10(3), 190–195 (2016).
[Crossref]

X. Han and J. Yao, “Bandstop-to-bandpass microwave photonic filter using a phase-shifted fiber bragg grating,” J. Lightwave Technol. 33(24), 5133–5139 (2015).
[Crossref]

N. Ehteshami, W. Zhang, and J. Yao, “Optically Tunable Single Passband Microwave Photonic Filter Based on Phase-Modulation to Intensity-Modulation Conversion in a Silicon-on-Insulator Microring Resonator,” in International Topical Meeting on Microwave Photonics, (2015).

Yu, H.

Yu, S.

Yu, Y.

Yuan, S.

Yun, B.

P. Zheng, H. Hong, J. Li, G. Hu, B. Yun, and Y. Cui, “Performances of Microwave Photonic Notch Filter Based on Microring Resonator with Dual-Drive Modulator,” IEEE Photonics J. 11(1), 1–13 (2019).
[Crossref]

Yvind, K.

Zhang, H.

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

Zhang, L.

L. Zhang, L. Jie, M. Zhang, Y. Wang, Y. Xie, Y. Shi, and D. Dai, “Ultra-high-Q Silicon Race-track Resonators,” Photonics Res. 8(5), 684–689 (2020).
[Crossref]

Zhang, M.

L. Zhang, L. Jie, M. Zhang, Y. Wang, Y. Xie, Y. Shi, and D. Dai, “Ultra-high-Q Silicon Race-track Resonators,” Photonics Res. 8(5), 684–689 (2020).
[Crossref]

Zhang, W.

W. Zhang and R. A. Minasian, “Switchable and Tunable Microwave Photonic Brillouin-Based Filter,” IEEE Photonics J. 4(5), 1443–1455 (2012).
[Crossref]

N. Ehteshami, W. Zhang, and J. Yao, “Optically Tunable Single Passband Microwave Photonic Filter Based on Phase-Modulation to Intensity-Modulation Conversion in a Silicon-on-Insulator Microring Resonator,” in International Topical Meeting on Microwave Photonics, (2015).

Zhang, X.

Zhang, Y.

Zhang, Z.

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

Z. Zhang, B. Huang Z, Z. C. Cheng, and H. Chen, “Microwave photonic filter with reconfigurable and tunable bandpass response using integrated optical signal processor based on microring resonator,” Opt. Eng. 52(12), 127102 (2013).
[Crossref]

Zheng, P.

P. Zheng, H. Hong, J. Li, G. Hu, B. Yun, and Y. Cui, “Performances of Microwave Photonic Notch Filter Based on Microring Resonator with Dual-Drive Modulator,” IEEE Photonics J. 11(1), 1–13 (2019).
[Crossref]

Zhu, Z.

Zhuang, L.

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

APL Photonics (1)

Y. Liu, A. Choudhary, G. Ren, K. Vu, B. Morrison, A. C. Bedoya, T. G. Nguyen, D. Choi, P. Ma, A. Mitchell, S. J. Madden, D. Marpaung, and B. J. Eggleton, “Integration of Brillouin and passive circuits for enhanced radio-frequency photonic filtering,” APL Photonics 4(10), 106103 (2019).
[Crossref]

IEEE J. Sel. Top. Quantum Electron. (2)

C. G. H. Roeloffzen, M. Hoekman, E. J. Klein, L. S. Wevers, R. B. Timens, D. Marchenko, D. Geskus, R. Dekker, A. Alippi, R. Grootjans, A. V. Rees, R. M. Oldenbeuving, J. P. Epping, R. G. Heideman, K. Worhoff, A. Leinse, D. Geuzebroek, E. Schreuder, P. W. L. V. Dijk, I. Visscher, C. Taddei, Y. Fan, C. Taballione, Y. Liu, D. Marpaung, L. Zhuang, M. Benelajla, and K. J. Boller, “Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview,” IEEE J. Sel. Top. Quantum Electron. 24(4), 1–21 (2018).
[Crossref]

H. Zhang, B. Huang, Z. Zhang, C. Cheng, Z. Zhang, H. Zhang, Y. Cheng, R. Chen, and H. Chen, “Monolithic Integration of CMOS Temperature Control Circuit and Si3N4 Microring Filters for Wavelength Stabilization Within Ultra Wide Operating Temperature Range,” IEEE J. Sel. Top. Quantum Electron. 26(2), 1–7 (2020).
[Crossref]

IEEE Photonics J. (2)

W. Zhang and R. A. Minasian, “Switchable and Tunable Microwave Photonic Brillouin-Based Filter,” IEEE Photonics J. 4(5), 1443–1455 (2012).
[Crossref]

P. Zheng, H. Hong, J. Li, G. Hu, B. Yun, and Y. Cui, “Performances of Microwave Photonic Notch Filter Based on Microring Resonator with Dual-Drive Modulator,” IEEE Photonics J. 11(1), 1–13 (2019).
[Crossref]

IEEE Photonics Technol. Lett. (1)

A. Savchenkov, V. Ilchenko, E. Dale, D. Seidel, A. Matsko, and L. Maleki, “Agile High-Q RF Photonic Zooming Filter,” IEEE Photonics Technol. Lett. 28(1), 43–46 (2016).
[Crossref]

J. Lightwave Technol. (2)

Laser Photonics Rev. (1)

W. Bogaerts, P. D. Heyn, T. V. Vaerenbergh, K. DeVos, S. K. Selvaraja, T. Claes, P. Dumon, P. Bienstman, D. V. Thourhout, and R. Baets, “Silicon microring resonators,” Laser Photonics Rev. 6(1), 47–73 (2012).
[Crossref]

Nat. Photonics (2)

J. Capmany and D. Novak, “Microwave photonics combines two worlds,” Nat. Photonics 1(6), 319–330 (2007).
[Crossref]

W. Liu, M. Li, R. S. Guzzon, E. J. Norberg, J. S. Parker, M. Lu, L. A. Coldren, and J. Yao, “A fully reconfigurable photonic integrated signal processor,” Nat. Photonics 10(3), 190–195 (2016).
[Crossref]

Opt. Eng. (2)

R. Hernandez, A. Loayssa, and D. Benito, “Optical vector network analysis based on single-sideband modulation,” Opt. Eng. 43(10), 2418 (2004).
[Crossref]

Z. Zhang, B. Huang Z, Z. C. Cheng, and H. Chen, “Microwave photonic filter with reconfigurable and tunable bandpass response using integrated optical signal processor based on microring resonator,” Opt. Eng. 52(12), 127102 (2013).
[Crossref]

Opt. Express (6)

Opt. Lett. (4)

Optica (1)

Photonics (1)

P. M. Fok and J. Ge, “Tunable Multiband Microwave Photonic Filters,” Photonics 4(4), 45 (2017).
[Crossref]

Photonics Res. (2)

T. Hu, B. Dong, X. Luo, T. Liow, J. Song, C. Lee, and G. Lo, “Silicon photonic platforms for mid-infrared Applications,” Photonics Res. 5(5), 417–430 (2017).
[Crossref]

L. Zhang, L. Jie, M. Zhang, Y. Wang, Y. Xie, Y. Shi, and D. Dai, “Ultra-high-Q Silicon Race-track Resonators,” Photonics Res. 8(5), 684–689 (2020).
[Crossref]

Proc. IEEE (1)

D. J. Blumenthal, R. Heideman, D. Geuzebroek, A. Leinse, and C. Roeloffzen, “Silicon Nitride in Silicon Photonics,” Proc. IEEE 106(12), 2209–2231 (2018).
[Crossref]

Proc. SPIE (1)

W. Hoving, R. Heideman, D. Geuzebroek, A. Leinse, E. Klein, and R. Dekkera, “Low loss, high contrast planar optical waveguides based on low-cost CMOS compatible LPCVD processing,” Proc. SPIE 6996, 699612 (2008).
[Crossref]

Other (2)

M. Burla, B. Crockett, L. Chrostowski, and J. Azaña, “Ultra-high Q Multimode Waveguide Ring Resonators for Microwave Photonics Signal Processing,” in International Topical Meeting on Microwave Photonics, (2015).

N. Ehteshami, W. Zhang, and J. Yao, “Optically Tunable Single Passband Microwave Photonic Filter Based on Phase-Modulation to Intensity-Modulation Conversion in a Silicon-on-Insulator Microring Resonator,” in International Topical Meeting on Microwave Photonics, (2015).

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Figures (13)

Fig. 1.
Fig. 1. (a) The structure of the silicon nitride multimode microring resonator. (b). The cross-section of the double strip silicon nitride waveguide.
Fig. 2.
Fig. 2. (a)-(c) R=225 µm, r=175 µm. (d)-(f) R=205 µm, r=195 µm.
Fig. 3.
Fig. 3. The electric field intensity distributions of the seven supported TE modes in the bend Si3N4 multimode waveguide.
Fig. 4.
Fig. 4. The optical transmission spectrum of the silicon nitride multimode microring resonator.
Fig. 5.
Fig. 5. (a)The comparison of the measured and fitted optical transmission spectra of the silicon nitride multimode microring resonator. (b) An enlarged view of one FSR.
Fig. 6.
Fig. 6. (a) The spectra of the silicon nitride multimode microring resonator measured by the optical vector network method. (b) An enlarged view of TE2 and TE3 modes.
Fig. 7.
Fig. 7. The comparison of synthesized and measured spectra of TE1∼TE5 modes.
Fig. 8.
Fig. 8. The system scheme of the reconfigurable MPF.
Fig. 9.
Fig. 9. The principle diagram of the bandstop MPF with an ultra-high RF rejection ratio.
Fig. 10.
Fig. 10. The principle diagram of the bandpass MPF.
Fig. 11.
Fig. 11. The measured spectra of the bandpass and bandstop switchable MPF.
Fig. 12.
Fig. 12. The frequency tuning of the (a) bandstop MPF. (b) bandpass MPF.
Fig. 13.
Fig. 13. (a) The selected two resonances of the silicon nitride multimode microring resonator. (b)The measured RF spectra of the dual-band bandpass and bandstop switchable MPF.

Tables (3)

Tables Icon

Table 1. The bandwidth comparison of reported IMPFs.

Tables Icon

Table 2. Synthesized parameters for each mode.

Tables Icon

Table 3. 3 dB bandwidths of TE1∼TE5 modes.

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

H i ( φ )  =  t i a i e j ( ϕ i + φ i ( λ ) ) 1 t i a i e j ( ϕ i + φ i ( λ ) ) ( i = 0 ,   1 ,   2 ,   6 )
φ ( λ )  =  c 2 π λ n e f f i ( λ ) L ( i = 0 ,   1 ,   2 ,   6 )

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