Abstract

A controlled, 3D selective inductively coupled plasma reactive ion etching process (ICP-RIE) was employed to fabricate high aspect ratio tiered resonant nanopillars (TR-NPs) made of two Bragg reflectors consisting of a stack of Si3N4/SiO2 alternate layers, a resonant SiO2 central cavity, and nickel caps. The 3D etching process led to a vertical full etching, and also to a horizontal highly selective etching that preserves SiO2 layers while the Si3N4 layers are slowly etched. Resulting TR-NPs periodic arrays were tested as optical sensors and highlighted a 28% increment in bulk sensitivity (379 nm RIU−1) comparing with conventional Si3N4/SiO2 resonant NPs without metal caps (296 nm RIU−1) considering the resonance feature located in the 580-630 nm wavelength range.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

1. Introduction

In the past years, different types of chemical sensors and biosensors based on ordered arrays of nanopillars (NPs) have been successfully developed and reported in the literature [1–8]. In comparison with a flat sensing surface, NPs arrays considerably increase the available surface for the attachment of chemical or biological elements, which can lead to a higher performance of the sensor. From the optics point of view, and depending on the pillars architecture, arrays of nanoscale pillars benefit from different interactions among light and the pillars, as field confinement or a variety of resonant effects like surface plasmon resonance [9,10], localized surface plasmon resonance [11,12], metal assisted guided mode resonance [13] and surface-enhanced Raman scattering [14–16]. These NPs can be produced using a variety of fabrication methods and materials and can be optically interrogated by using common measurement techniques.

In previous works the development of periodic arrays of dielectric resonant NPs (R-NPs) made with two Bragg reflectors consisting of a stack of Si3N4/SiO2 alternate layers, 5 pairs each, with a central region of SiO2, was reported [17,18]. Fabrication consisted of an initial deposition of an anti-reflective coating and a photoresist, followed by the deposition of films of SiO2 and chromium (Cr) using an e-beam evaporator, then a pattern was written by means of laser interference lithography (LIL), the patterns were then transferred using reactive ion etching, and finally the remaining Cr caps were removed with a proper Cr etchant. Normal incidence visible light on the backside of the transparent substrate generates a sharp, well defined resonant mode in reflectance that shifts as a function of refractive index (RI) variations of the environment in contact with the pillars. This effect is certainly used for sensing purposes as label-free biosensing [19]. Other advantages offered by these optical biosensors are the high chemical stability in aqueous media, high optical transparency and the possibility of surface functionalization.

In this work, we go a step forward in the resonant Si3N4/SiO2 NPs fabrication leading to a novel tiered nanostructure of SiO2 disks linked by Si3N4 necks, obtained after a controlled, selective inductively coupled plasma reactive ion etching process (ICP-RIE). The tiered resonant nanopillars (TR-NPs) surface-to-volume ratio is much higher than the already reported conventional R-NPs, and the fabrication complexity is reduced because the metal mask disks are conserved as nanomirrors. The result is a remarkable bulk sensitivity increment offered by these array-based optical sensors suitable for biochemical sensing. To our knowledge, this is the first demonstration of TR-NPs based optical sensors made from a Si3N4/SiO2 multilayer resonant stack, albeit some other nanostructures showing a certain resemblance have been already reported [20], however they were made with different materials, wet-etching instead dry-etching, and aiming to different purposes. Furthermore, the fabrication method shown in this work may be useful for bio-inspired nanoarchitectures replication, in particular structures resembling the nanostructures found on the iridescent Morpho butterfly wings, with interesting photonic properties and possible applications in biosensing as well [21–25].

2. Experimental

The multilayer stack, deposited onto a 0.5 mm thick quartz substrate, comprises two Bragg reflectors with five alternate layers of SiO2 (thickness ~110 nm) and Si3N4 (thickness ~95 nm) each. A ~210 nm thick layer of SiO2 is located between the Bragg reflectors playing the role of an optical resonant cavity, there are Si3N4 layers in contact with the central SiO2 cavity, and SiO2 layers are placed both on the top and the bottom of the stack. Total multilayer thickness is around 2200 nm, and the layers were grown by mid frequency magnetron sputtering with additional plasma oxidation for both materials by the Fraunhofer Research Organization [26–28]. RI values in the 580-630 nm wavelength range vary as following: 1.4646-1.4626 for SiO2 and 2.0197-2.0121 for Si3N4, respectively.

A 300 × 300 µm2, high aspect ratio TR-NPs array was fabricated by combining electron-beam lithography (EBL) in a Crestec CABL-9000 C high-resolution EBL system with ICP-RIE, using an Oxford Instruments NGP80 ICP65. The structure is a squared periodic array, pitch 500 nm, with ~250 nm in diameter TR-NPs showing a characteristic tiered morphology. The detailed fabrication process is as following and is shown in Fig. 1.

 

Fig. 1 Schematic diagram of the steps involved in the TR-NPs fabrication. The process involves EBL to make arrays of nanoholes, metal deposition, lift-off step, and CHF3/O2 plasma etch.

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First, ZEP-520 (Zeon Chemicals) positive-tone EBL resist was spin-coated on the Si3N4/SiO2 stack at 4000 rpm and immediately baked for 2 min at 160 °C. Once the sample reached room temperature, Espacer 300Z (Showa Denko) was spin-coated at 5000 rpm to obtain a conductive thin layer. Next, 500-nm-period square lattice of 5 nm in diameter circular solid dots were written on the resist thin film by EBL at 50 kV and 50 pA, following the same procedure used in a previously published work [13] involving ultra-small nanocircle patterns layout and out-of-focus beam exposition, this time applying a high dose of 960 mC cm−2. After EBL process, the sample was thoroughly washed under deionized water flow to remove the conductive layer, then dried with nitrogen gun, then developed using ZED N50 (Zeon Chemicals) at 20 °C during 60 s under gently agitation and, finally, dried using nitrogen flow.

The resulting array of nanoholes in ZEP-520 resist was coated with a 100-nm-thick nickel film by electron-beam thermal evaporation at a deposition rate of 1 Å s−1. Next, a lift-off step using 1-methyl-2-pyrrolidone (Emplura, Merck KGaA) at 80 °C was carried out, removing the EBL resist and leaving an array of nickel nanodisks onto the Si3N4/SiO2 stack as a mask for dry etching.

The ICP-RIE process used to create the TR-NPs was achieved using CHF3 (50 sccm) and O2 (3 sccm) gases, RF and ICP power of 150 W each and pressure chamber of 30 mTorr, until a laser interferometer end point detector (Global Laser Technology Solutions, Intellevation LEP 400) indicated a full etch of the Si3N4/SiO2 multilayer. Etching time was around 1000 s, and nickel caps remained unaltered after this ICP-RIE step.

A FEI Inspect F50 scanning electron microscope (SEM) set at 2 kV was employed for morphological characterization. Optical characterization was performed by combining a Stellarnet Inc. visible light source and a Mightex HRS-VIS-005 CCD spectrometer, using an optic fiber setup to interrogate the TR-NPs array through the transparent quartz substrate and also to collect the reflected light in the 370-830 nm range. When the signal intensity is maximized, the optical fibers are almost in contact with the substrate backside and the light spot diameter is 600 µm in diameter approximately when it hits the NPs, meaning that all the NPs of the array contribute to the optical response. Along the interrogation optical fiber, there was another fiber for reflected light collection. In all cases, one spectrum was acquired every second during 100 s, applying a Savitzky-Golay smoothing process (k = 2, f = 201). Figure 2 shows a diagram of the optical characterization setup.

 

Fig. 2 Sketch of the optical measuring setup for liquids. The sample with NPs is placed downside on a cell filled with liquid. Optical interrogation is performed through the transparent quartz substrate using an optical fiber, and reflected light is collected with another optical fiber adjacent to the first one.

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With the purpose of conducting a bulk sensing experiment, the TR-NPs array was interrogated in air and using the following solvents in contact only with the sample side containing the array: deionized water (DIW, RI = 1.332), ethanol (EtOH, RI = 1.3613), hexane (RI = 1.3754), isopropyl alcohol (IPA, RI = 1.3825), heptane (RI = 1.3885), dimethyl sulfoxide (DMSO, RI = 1.4765) and toluene (RI = 1.4958). After measuring with every solvent, the sample was washed with IPA, gently dried with nitrogen flow and heated at 85 °C for 5 minutes on a hot plate to remove the IPA residues. The resulting spectra show reflectance, with some resonant minimum peaks which shift to the red when the RI of the environment in contact with the TR-NPs increases.

3. Results and discussion

Regarding the fabrication process and the techniques employed, EBL step took 64 minutes for the 300 × 300 µm2 array exposition. However, 1 minute is feasible by optimizing a single-shot EBL exposition strategy to speed up this process. The lithography time needed can also be drastically reduced if other techniques like LIL [18] or nanoimprint lithography [29] are used instead EBL.

Concerning etching time, conventional R-NPs etching required around 130 minutes [18] due to a 16.1 nm min−1 etch rate for the Si3N4/SiO2 multilayer. In this work, the dry etch step needed around 15 minutes (etch rate equals 132 nm min−1), and we observed that this time lapse can be reduced to 5 minutes or less playing adequately with the ICP-RIE parameters. The CHF3 + O2 gas mixture and an appropriate combination of pressure chamber, flow and power generated a plasma capable, on the one hand, of a relatively fast vertical etch of Si3N4/SiO2 stack and, on the other, of a selective, slow Si3N4 horizontal etch at an appropriate rate (6 nm min−1 approximately) which led to the tiered nanostructure in only one etching step. A probable explanation of this phenomenon is the abundant ions collisions in the ICP-RIE chamber under the conditions employed for the plasma generation, conducting a 3D etching process that includes the expected vertical etch plus the capability of a horizontal, much slower etch. The resulting tiered structure emerges from a very high Si3N4:SiO2 etching ratio in the horizontal plane (parallel to the substrate) which allows for the conservation of the oxide layers while the nitride layers are etched.

Figure 3 contains some examples of high aspect ratio TR-NPs made of Si3N4/SiO2 pillars after selective Si3N4 etching, and a top view showing the high uniformity of the fabricated arrays. Figure 1(a) shows a highly etched isolated nanopillar of 600 nm in diameter approximately; in fact it is hard to see the Si3N4 connecting necks between SiO2 disks in the upper part. Figure 1(b) shows two parallel rows of TR-NPs from the first fabrication experiments: pillars diameter is 350 nm and the pitch is 875 nm. Figure 1(c) shows part of the TR-NPs 500 nm pitch array used in the bulk sensing experiment. All the TR-NPs are close to 2200 nm in height and have a 100 nm nickel cap. It is clearly observed that lower TR-NPs region is usually less etched than upper part because the exposition time to the plasma is shorter. Figure 1(d) shows a uniform large area of the same array shown in Fig. 1(c).

 

Fig. 3 SEM images of different TR-NPs. (a) Isolated, tiered nanopillar of 600 nm in diameter. (b) TR-NPs are 350 nm wide, pitch 875 nm. (c) TR-NPs are 250 nm wide, pitch 500 nm. (d) Top view of a large uniform area of the same TR-NPs shown in (c). Scale bars equal 500 nm for (a-c) and 10 µm for (d). (a-c) are 85° tilted views.

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Additional fabrication experiments reveal the probable influence of the lattice pitch in the horizontal etch rate if compared with the isolated TR-NP instance. In the latter case, horizontal etch rate seems to be higher, as expected, probably because the TR-NP is more exposed to the surrounding plasma. In the case of different lattice pitches, seems that there are not important differences in horizontal etch rate and TR-NPs morphology in the 500-800 nm pitch range.

In order to compare the TR-NPs performance, bulk RI sensing tests were conducted with the abovementioned TR-NPs array along with a conventional R-NPs array made like the samples previously reported [17–19]. In both cases, arrays have square lattices of nanopillars of ~250 nm in diameter, pitch 500 nm. The optical response (reflectance) is shown in Fig. 4. The multilayer stack in both cases is the same and was designed to obtain a prevailing resonant dip for previous works [17] involving conventional R-NPs, as can be checked in Fig. 4(a), where the studied peak for bulk sensing is marked in a box. Figure 4(b) shows the same spectra for the TR-NPs with nickel cap array instance. The latter shows a less defined minimum resonant peak because the multilayer stack is not optimized to match the photonic gap of the TR-NPs array, but it is good enough to study the bulk sensitivity and allows for an optical behavior comparison considering the same stack and lattice parameter. The optimization of the array configuration, the metal employed and the multilayer stack will be studied in future works for a better tuning of the studied peak with the photonic gap given by the resonant cavity. Note that TR-NPs with nickel cap spectra show additional and better defined resonances located at longer wavelength which therefore can be related with the resonant cavity, however the focus of this work is to compare the same spectral region.

 

Fig. 4 Spectra acquired with a visible spectrometer considering different solvents in contact with a conventional R-NPs array (a) and a TR-NPs with nickel cap array (b). In both cases, there is a resonant minimum peak in the 580-630 nm wavelength range. Minimum peaks regions are enlarged to improve clarity.

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Figure 5 shows the linear fitting for conventional R-NPs and nickel capped TR-NPs arrays considering the resonant minimum peak position shift. In both cases, the sensor response is highly linear (adjusted correlation coefficient, R2, is 0.9972 for R-NPs and 0.9966 for TR-NPs) over a wide range of RI values, giving bulk sensitivity values of SB = dλ/dn = 295.93 nm RIU−1 for R-NPs and 379.13 nm RIU−1 for TR-NPs considering the minimum peak associated with the resonant cavity, which is located in the 580-630 nm wavelength range for the solvents employed in the test. This result means a 28.11% bulk sensitivity increment for the nickel capped TR-NPs presented in this work. Standard deviation (SD) of every 100 measurements for every solvent was set in 0.12 nm, which is the resolution of the spectrometer, since the calculated SD is sometimes slightly under that value, demonstrating very high measurement stability.

 

Fig. 5 Linear fitting of the resonant minimum peak position for a conventional R-NPs array (solid line) and a TR-NPs array (dashed line), square lattice and pitch 500 nm in both cases. Bulk sensing tests with different solvents gave values of SB (R-NPs) ~296 nm RIU−1 and SB (TR-NPs) ~379 nm RIU−1, showing a 28% sensitivity increment approximately.

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4. Conclusions

Periodic arrays of high aspect ratio, tiered Si3N4/SiO2 resonant nanopillars with nickel caps working as nanomirrors were fabricated by means of EBL and ICP-RIE through controlled and selective, 3D dry-etching of the nitride/oxide multilayer. The resulting tiered nanostructure involves less fabrication steps and the available specific surface is significantly higher if compared with previously reported conventional nanopillars. The metal capped TR-NPs array showed robustness during a bulk sensing test involving different solvents and drying steps, and demonstrated a remarkable improvement as optical sensor suitable for chemical and biochemical sensing, giving a bulk sensitivity of 379.12 nm RIU−1 considering the resonant peak in the 580-630 nm wavelength range, highlighting a 28% increment in sensitivity comparing with standard Si3N4/SiO2 conventional R-NPs. Future work comprises the study of alternative multilayer configurations, different array parameters and different cap metals in order to find better quality spectral peaks for sensing and to improve the sensor sensitivity. Finally, the development of the selective, 3D dry-etching process employed in this work opens the door to a controlled one-step fabrication of tiered or undercut novel nanostructures.

Funding

European Commission projects ENVIGUARD (FP7-OCEAN-2013-614057) and ALLERSCREENING (H2020-NMBP-2017-768641); Spanish Ministry “Ministerio de Economía y Competitividad” projects PLATON (TEC2012-31145) and ATAPOC (RTC-2015-3273-1).

Acknowledgment

We thank the Optics, Photonics and Biophotonics laboratory and the Institute for Optoelectronic Systems and Microtechnology, both from UPM, for the use of their facilities and equipment.

References and links

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5. F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012). [CrossRef]   [PubMed]  

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11. M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011). [CrossRef]  

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References

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  1. V. Kugel and H.-F. Ji, “Nanopillars for sensing,” J. Nanosci. Nanotechnol. 14(9), 6469–6477 (2014).
    [Crossref] [PubMed]
  2. Y. Suzuki and K. Yokoyama, “Construction of a more sensitive fluorescence sensing material for the detection of vascular endothelial growth factor, a biomarker for angiogenesis, prepared by combining a fluorescent peptide and a nanopillar substrate,” Biosens. Bioelectron. 26(8), 3696–3699 (2011).
    [Crossref] [PubMed]
  3. V. Anandan, Y. L. Rao, and G. Zhang, “Nanopillar array structures for enhancing biosensing performance,” Int. J. Nanomedicine 1(1), 73–80 (2006).
    [Crossref] [PubMed]
  4. M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
    [Crossref] [PubMed]
  5. F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
    [Crossref] [PubMed]
  6. F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
    [Crossref] [PubMed]
  7. L.-J. Bie, X.-N. Yan, J. Yin, Y.-Q. Duan, and Z.-H. Yuan, “Nanopillar ZnO gas sensor for hydrogen and ethanol,” Sens. Actuators B Chem. 126(2), 604–608 (2007).
    [Crossref]
  8. W. Li, M. Hu, P. Ge, J. Wang, and Y. Guo, “Humidity sensing properties of morphology-controlled ordered silicon nanopillar,” Appl. Surf. Sci. 317, 970–973 (2014).
    [Crossref]
  9. M.-C. Estevez, M. A. Otte, B. Sepulveda, and L. M. Lechuga, “Trends and challenges of refractometric nanoplasmonic biosensors: A review,” Anal. Chim. Acta 806, 55–73 (2014).
    [Crossref] [PubMed]
  10. M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
    [Crossref] [PubMed]
  11. M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011).
    [Crossref]
  12. A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
    [Crossref] [PubMed]
  13. V. Canalejas-Tejero, A. López, R. Casquel, M. Holgado, and C. A. Barrios, “Sensitive metal layer-assisted guided-mode resonance SU8 nanopillar array for label-free optical biosensing,” Sens. Actuators B Chem. 226, 204–210 (2016).
    [Crossref]
  14. J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
    [Crossref] [PubMed]
  15. M. S. Schmidt, J. Hübner, and A. Boisen, “Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy,” Adv. Mater. 24(10), OP11–OP18 (2012).
    [PubMed]
  16. K. Wu, T. Li, M. S. Schmidt, T. Rindzevicius, A. Boisen, and S. Ndoni, “Gold Nanoparticles Sliding on Recyclable Nanohoodoos-Engineered for Surface-Enhanced Raman Spectroscopy,” Adv. Funct. Mater. 28(2), 1704818 (2018).
    [Crossref]
  17. A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. J. Sanza, B. Santamaría, M. Maigler, F. Fernández, A. Lavín, and M. F. Laguna, “Arrays of resonant nanopillars for biochemical sensing,” Opt. Lett. 40(10), 2370–2372 (2015).
    [Crossref] [PubMed]
  18. I. Cornago, A. L. Hernández, R. Casquel, M. Holgado, M. F. Laguna, F. J. Sanza, and J. Bravo, “Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography,” Opt. Mater. Express 6(7), 2264 (2016).
    [Crossref]
  19. A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. Fernández, P. Ciaurriz, F. J. Sanza, B. Santamaría, M. V. Maigler, and M. F. Laguna, “Resonant nanopillars arrays for label-free biosensing,” Opt. Lett. 41(23), 5430–5433 (2016).
    [Crossref] [PubMed]
  20. S. Naureen, N. Shahid, A. Dev, and S. Anand, “Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si,” Nanotechnology 24(22), 225301 (2013).
    [Crossref] [PubMed]
  21. A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
    [Crossref]
  22. R. H. Siddique, S. Diewald, J. Leuthold, and H. Hölscher, “Theoretical and experimental analysis of the structural pattern responsible for the iridescence of Morpho butterflies,” Opt. Express 21(12), 14351–14361 (2013).
    [Crossref] [PubMed]
  23. R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
    [Crossref] [PubMed]
  24. C. A. Tippets, Y. Fu, A.-M. Jackson, E. U. Donev, and R. Lopez, “Reproduction and optical analysis of Morpho -inspired polymeric nanostructures,” J. Opt. 18(6), 065105 (2016).
    [Crossref]
  25. O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
    [Crossref] [PubMed]
  26. D. Rademacher, T. Zickenrott, and M. Vergöhl, “Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration,” Thin Solid Films 532, 98–105 (2013).
    [Crossref]
  27. M. Vergöhl, D. Rademacher, and A. Pflug, “Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system,” Surf. Coat. Tech. 241, 38–44 (2014).
    [Crossref]
  28. M. Vergöhl, S. Bruns, D. Rademacher, and G. Bräuer, “Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system,” Surf. Coat. Tech. 267, 53–58 (2015).
    [Crossref]
  29. C.-W. Kuo, J.-Y. Shiu, and P. Chen, “Size- and Shape-Controlled Fabrication of Large-Area Periodic Nanopillar Arrays,” Chem. Mater. 15(15), 2917–2920 (2003).
    [Crossref]

2018 (1)

K. Wu, T. Li, M. S. Schmidt, T. Rindzevicius, A. Boisen, and S. Ndoni, “Gold Nanoparticles Sliding on Recyclable Nanohoodoos-Engineered for Surface-Enhanced Raman Spectroscopy,” Adv. Funct. Mater. 28(2), 1704818 (2018).
[Crossref]

2016 (6)

C. A. Tippets, Y. Fu, A.-M. Jackson, E. U. Donev, and R. Lopez, “Reproduction and optical analysis of Morpho -inspired polymeric nanostructures,” J. Opt. 18(6), 065105 (2016).
[Crossref]

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
[Crossref] [PubMed]

V. Canalejas-Tejero, A. López, R. Casquel, M. Holgado, and C. A. Barrios, “Sensitive metal layer-assisted guided-mode resonance SU8 nanopillar array for label-free optical biosensing,” Sens. Actuators B Chem. 226, 204–210 (2016).
[Crossref]

I. Cornago, A. L. Hernández, R. Casquel, M. Holgado, M. F. Laguna, F. J. Sanza, and J. Bravo, “Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography,” Opt. Mater. Express 6(7), 2264 (2016).
[Crossref]

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. Fernández, P. Ciaurriz, F. J. Sanza, B. Santamaría, M. V. Maigler, and M. F. Laguna, “Resonant nanopillars arrays for label-free biosensing,” Opt. Lett. 41(23), 5430–5433 (2016).
[Crossref] [PubMed]

2015 (3)

M. Vergöhl, S. Bruns, D. Rademacher, and G. Bräuer, “Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system,” Surf. Coat. Tech. 267, 53–58 (2015).
[Crossref]

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. J. Sanza, B. Santamaría, M. Maigler, F. Fernández, A. Lavín, and M. F. Laguna, “Arrays of resonant nanopillars for biochemical sensing,” Opt. Lett. 40(10), 2370–2372 (2015).
[Crossref] [PubMed]

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

2014 (4)

M. Vergöhl, D. Rademacher, and A. Pflug, “Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system,” Surf. Coat. Tech. 241, 38–44 (2014).
[Crossref]

V. Kugel and H.-F. Ji, “Nanopillars for sensing,” J. Nanosci. Nanotechnol. 14(9), 6469–6477 (2014).
[Crossref] [PubMed]

W. Li, M. Hu, P. Ge, J. Wang, and Y. Guo, “Humidity sensing properties of morphology-controlled ordered silicon nanopillar,” Appl. Surf. Sci. 317, 970–973 (2014).
[Crossref]

M.-C. Estevez, M. A. Otte, B. Sepulveda, and L. M. Lechuga, “Trends and challenges of refractometric nanoplasmonic biosensors: A review,” Anal. Chim. Acta 806, 55–73 (2014).
[Crossref] [PubMed]

2013 (3)

S. Naureen, N. Shahid, A. Dev, and S. Anand, “Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si,” Nanotechnology 24(22), 225301 (2013).
[Crossref] [PubMed]

R. H. Siddique, S. Diewald, J. Leuthold, and H. Hölscher, “Theoretical and experimental analysis of the structural pattern responsible for the iridescence of Morpho butterflies,” Opt. Express 21(12), 14351–14361 (2013).
[Crossref] [PubMed]

D. Rademacher, T. Zickenrott, and M. Vergöhl, “Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration,” Thin Solid Films 532, 98–105 (2013).
[Crossref]

2012 (4)

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

M. S. Schmidt, J. Hübner, and A. Boisen, “Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy,” Adv. Mater. 24(10), OP11–OP18 (2012).
[PubMed]

M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
[Crossref] [PubMed]

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

2011 (4)

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

Y. Suzuki and K. Yokoyama, “Construction of a more sensitive fluorescence sensing material for the detection of vascular endothelial growth factor, a biomarker for angiogenesis, prepared by combining a fluorescent peptide and a nanopillar substrate,” Biosens. Bioelectron. 26(8), 3696–3699 (2011).
[Crossref] [PubMed]

M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011).
[Crossref]

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

2010 (1)

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

2007 (1)

L.-J. Bie, X.-N. Yan, J. Yin, Y.-Q. Duan, and Z.-H. Yuan, “Nanopillar ZnO gas sensor for hydrogen and ethanol,” Sens. Actuators B Chem. 126(2), 604–608 (2007).
[Crossref]

2006 (1)

V. Anandan, Y. L. Rao, and G. Zhang, “Nanopillar array structures for enhancing biosensing performance,” Int. J. Nanomedicine 1(1), 73–80 (2006).
[Crossref] [PubMed]

2003 (1)

C.-W. Kuo, J.-Y. Shiu, and P. Chen, “Size- and Shape-Controlled Fabrication of Large-Area Periodic Nanopillar Arrays,” Chem. Mater. 15(15), 2917–2920 (2003).
[Crossref]

Anand, S.

S. Naureen, N. Shahid, A. Dev, and S. Anand, “Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si,” Nanotechnology 24(22), 225301 (2013).
[Crossref] [PubMed]

Anandan, V.

V. Anandan, Y. L. Rao, and G. Zhang, “Nanopillar array structures for enhancing biosensing performance,” Int. J. Nanomedicine 1(1), 73–80 (2006).
[Crossref] [PubMed]

Bañuls, M. J.

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Barrios, C. A.

V. Canalejas-Tejero, A. López, R. Casquel, M. Holgado, and C. A. Barrios, “Sensitive metal layer-assisted guided-mode resonance SU8 nanopillar array for label-free optical biosensing,” Sens. Actuators B Chem. 226, 204–210 (2016).
[Crossref]

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Bassim, N. D.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Bezares, F. J.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Bie, L.-J.

L.-J. Bie, X.-N. Yan, J. Yin, Y.-Q. Duan, and Z.-H. Yuan, “Nanopillar ZnO gas sensor for hydrogen and ethanol,” Sens. Actuators B Chem. 126(2), 604–608 (2007).
[Crossref]

Boisen, A.

K. Wu, T. Li, M. S. Schmidt, T. Rindzevicius, A. Boisen, and S. Ndoni, “Gold Nanoparticles Sliding on Recyclable Nanohoodoos-Engineered for Surface-Enhanced Raman Spectroscopy,” Adv. Funct. Mater. 28(2), 1704818 (2018).
[Crossref]

A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
[Crossref] [PubMed]

M. S. Schmidt, J. Hübner, and A. Boisen, “Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy,” Adv. Mater. 24(10), OP11–OP18 (2012).
[PubMed]

Bonam, R. K.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Bräuer, G.

M. Vergöhl, S. Bruns, D. Rademacher, and G. Bräuer, “Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system,” Surf. Coat. Tech. 267, 53–58 (2015).
[Crossref]

Bravo, J.

Bruns, S.

M. Vergöhl, S. Bruns, D. Rademacher, and G. Bräuer, “Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system,” Surf. Coat. Tech. 267, 53–58 (2015).
[Crossref]

Bunning, T.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Caldwell, J. D.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Canalejas-Tejero, V.

V. Canalejas-Tejero, A. López, R. Casquel, M. Holgado, and C. A. Barrios, “Sensitive metal layer-assisted guided-mode resonance SU8 nanopillar array for label-free optical biosensing,” Sens. Actuators B Chem. 226, 204–210 (2016).
[Crossref]

Carrascosa, L. G.

M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011).
[Crossref]

Casquel, R.

V. Canalejas-Tejero, A. López, R. Casquel, M. Holgado, and C. A. Barrios, “Sensitive metal layer-assisted guided-mode resonance SU8 nanopillar array for label-free optical biosensing,” Sens. Actuators B Chem. 226, 204–210 (2016).
[Crossref]

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. Fernández, P. Ciaurriz, F. J. Sanza, B. Santamaría, M. V. Maigler, and M. F. Laguna, “Resonant nanopillars arrays for label-free biosensing,” Opt. Lett. 41(23), 5430–5433 (2016).
[Crossref] [PubMed]

I. Cornago, A. L. Hernández, R. Casquel, M. Holgado, M. F. Laguna, F. J. Sanza, and J. Bravo, “Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography,” Opt. Mater. Express 6(7), 2264 (2016).
[Crossref]

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. J. Sanza, B. Santamaría, M. Maigler, F. Fernández, A. Lavín, and M. F. Laguna, “Arrays of resonant nanopillars for biochemical sensing,” Opt. Lett. 40(10), 2370–2372 (2015).
[Crossref] [PubMed]

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Chen, P.

C.-W. Kuo, J.-Y. Shiu, and P. Chen, “Size- and Shape-Controlled Fabrication of Large-Area Periodic Nanopillar Arrays,” Chem. Mater. 15(15), 2917–2920 (2003).
[Crossref]

Ciaurriz, P.

Cornago, I.

Crahay, A.

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

Deng, T.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Deparis, O.

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

Dev, A.

S. Naureen, N. Shahid, A. Dev, and S. Anand, “Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si,” Nanotechnology 24(22), 225301 (2013).
[Crossref] [PubMed]

Diewald, S.

Donev, E. U.

C. A. Tippets, Y. Fu, A.-M. Jackson, E. U. Donev, and R. Lopez, “Reproduction and optical analysis of Morpho -inspired polymeric nanostructures,” J. Opt. 18(6), 065105 (2016).
[Crossref]

Duan, Y.-Q.

L.-J. Bie, X.-N. Yan, J. Yin, Y.-Q. Duan, and Z.-H. Yuan, “Nanopillar ZnO gas sensor for hydrogen and ethanol,” Sens. Actuators B Chem. 126(2), 604–608 (2007).
[Crossref]

Estevez, M.-C.

M.-C. Estevez, M. A. Otte, B. Sepulveda, and L. M. Lechuga, “Trends and challenges of refractometric nanoplasmonic biosensors: A review,” Anal. Chim. Acta 806, 55–73 (2014).
[Crossref] [PubMed]

Estévez, M.-C.

M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011).
[Crossref]

Fernández, F.

Feygelson, M.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Francis, L. A.

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

Fu, Y.

C. A. Tippets, Y. Fu, A.-M. Jackson, E. U. Donev, and R. Lopez, “Reproduction and optical analysis of Morpho -inspired polymeric nanostructures,” J. Opt. 18(6), 065105 (2016).
[Crossref]

Ge, P.

W. Li, M. Hu, P. Ge, J. Wang, and Y. Guo, “Humidity sensing properties of morphology-controlled ordered silicon nanopillar,” Appl. Surf. Sci. 317, 970–973 (2014).
[Crossref]

Ghiradella, H. T.

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Glembocki, O.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

González-Guerrero, A. B.

M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011).
[Crossref]

Grande, J. C.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Guo, Y.

W. Li, M. Hu, P. Ge, J. Wang, and Y. Guo, “Humidity sensing properties of morphology-controlled ordered silicon nanopillar,” Appl. Surf. Sci. 317, 970–973 (2014).
[Crossref]

Hartley, J. G.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Hernández, A. L.

Hoa, Q.

M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
[Crossref] [PubMed]

Holgado, M.

V. Canalejas-Tejero, A. López, R. Casquel, M. Holgado, and C. A. Barrios, “Sensitive metal layer-assisted guided-mode resonance SU8 nanopillar array for label-free optical biosensing,” Sens. Actuators B Chem. 226, 204–210 (2016).
[Crossref]

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. Fernández, P. Ciaurriz, F. J. Sanza, B. Santamaría, M. V. Maigler, and M. F. Laguna, “Resonant nanopillars arrays for label-free biosensing,” Opt. Lett. 41(23), 5430–5433 (2016).
[Crossref] [PubMed]

I. Cornago, A. L. Hernández, R. Casquel, M. Holgado, M. F. Laguna, F. J. Sanza, and J. Bravo, “Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography,” Opt. Mater. Express 6(7), 2264 (2016).
[Crossref]

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. J. Sanza, B. Santamaría, M. Maigler, F. Fernández, A. Lavín, and M. F. Laguna, “Arrays of resonant nanopillars for biochemical sensing,” Opt. Lett. 40(10), 2370–2372 (2015).
[Crossref] [PubMed]

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Hölscher, H.

Hosten, C.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Hu, M.

W. Li, M. Hu, P. Ge, J. Wang, and Y. Guo, “Humidity sensing properties of morphology-controlled ordered silicon nanopillar,” Appl. Surf. Sci. 317, 970–973 (2014).
[Crossref]

Hübner, J.

M. S. Schmidt, J. Hübner, and A. Boisen, “Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy,” Adv. Mater. 24(10), OP11–OP18 (2012).
[PubMed]

Jackson, A.-M.

C. A. Tippets, Y. Fu, A.-M. Jackson, E. U. Donev, and R. Lopez, “Reproduction and optical analysis of Morpho -inspired polymeric nanostructures,” J. Opt. 18(6), 065105 (2016).
[Crossref]

Ji, H.-F.

V. Kugel and H.-F. Ji, “Nanopillars for sensing,” J. Nanosci. Nanotechnol. 14(9), 6469–6477 (2014).
[Crossref] [PubMed]

Kasica, R.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Kitamura, A.

M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
[Crossref] [PubMed]

Kotipalli, R.

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

Kugel, V.

V. Kugel and H.-F. Ji, “Nanopillars for sensing,” J. Nanosci. Nanotechnol. 14(9), 6469–6477 (2014).
[Crossref] [PubMed]

Kuo, C.-W.

C.-W. Kuo, J.-Y. Shiu, and P. Chen, “Size- and Shape-Controlled Fabrication of Large-Area Periodic Nanopillar Arrays,” Chem. Mater. 15(15), 2917–2920 (2003).
[Crossref]

Laguna, M. F.

I. Cornago, A. L. Hernández, R. Casquel, M. Holgado, M. F. Laguna, F. J. Sanza, and J. Bravo, “Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography,” Opt. Mater. Express 6(7), 2264 (2016).
[Crossref]

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. Fernández, P. Ciaurriz, F. J. Sanza, B. Santamaría, M. V. Maigler, and M. F. Laguna, “Resonant nanopillars arrays for label-free biosensing,” Opt. Lett. 41(23), 5430–5433 (2016).
[Crossref] [PubMed]

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. J. Sanza, B. Santamaría, M. Maigler, F. Fernández, A. Lavín, and M. F. Laguna, “Arrays of resonant nanopillars for biochemical sensing,” Opt. Lett. 40(10), 2370–2372 (2015).
[Crossref] [PubMed]

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Larsen, M.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Lavín, A.

Le Tarte, L. A.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Lechuga, L. M.

M.-C. Estevez, M. A. Otte, B. Sepulveda, and L. M. Lechuga, “Trends and challenges of refractometric nanoplasmonic biosensors: A review,” Anal. Chim. Acta 806, 55–73 (2014).
[Crossref] [PubMed]

M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011).
[Crossref]

Leuthold, J.

Li, T.

K. Wu, T. Li, M. S. Schmidt, T. Rindzevicius, A. Boisen, and S. Ndoni, “Gold Nanoparticles Sliding on Recyclable Nanohoodoos-Engineered for Surface-Enhanced Raman Spectroscopy,” Adv. Funct. Mater. 28(2), 1704818 (2018).
[Crossref]

Li, W.

W. Li, M. Hu, P. Ge, J. Wang, and Y. Guo, “Humidity sensing properties of morphology-controlled ordered silicon nanopillar,” Appl. Surf. Sci. 317, 970–973 (2014).
[Crossref]

Lopez, R.

C. A. Tippets, Y. Fu, A.-M. Jackson, E. U. Donev, and R. Lopez, “Reproduction and optical analysis of Morpho -inspired polymeric nanostructures,” J. Opt. 18(6), 065105 (2016).
[Crossref]

López, A.

V. Canalejas-Tejero, A. López, R. Casquel, M. Holgado, and C. A. Barrios, “Sensitive metal layer-assisted guided-mode resonance SU8 nanopillar array for label-free optical biosensing,” Sens. Actuators B Chem. 226, 204–210 (2016).
[Crossref]

López-Romero, D.

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Maigler, M.

Maigler, M. V.

Maquieira, A.

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Maquieira, Á.

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

Morris, W. G.

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Mouchet, S. R.

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

Murahashi, M.

M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
[Crossref] [PubMed]

Naik, R. R.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Naureen, S.

S. Naureen, N. Shahid, A. Dev, and S. Anand, “Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si,” Nanotechnology 24(22), 225301 (2013).
[Crossref] [PubMed]

Ndoni, S.

K. Wu, T. Li, M. S. Schmidt, T. Rindzevicius, A. Boisen, and S. Ndoni, “Gold Nanoparticles Sliding on Recyclable Nanohoodoos-Engineered for Surface-Enhanced Raman Spectroscopy,” Adv. Funct. Mater. 28(2), 1704818 (2018).
[Crossref]

Ortega, F. J.

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Otte, M. A.

M.-C. Estevez, M. A. Otte, B. Sepulveda, and L. M. Lechuga, “Trends and challenges of refractometric nanoplasmonic biosensors: A review,” Anal. Chim. Acta 806, 55–73 (2014).
[Crossref] [PubMed]

M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011).
[Crossref]

Palacios, M. A.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Pan, J. Y.

A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
[Crossref] [PubMed]

Pflug, A.

M. Vergöhl, D. Rademacher, and A. Pflug, “Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system,” Surf. Coat. Tech. 241, 38–44 (2014).
[Crossref]

Poncelet, O.

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

Potyrailo, R. A.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Pris, A. D.

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Puchades, R.

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Rademacher, D.

M. Vergöhl, S. Bruns, D. Rademacher, and G. Bräuer, “Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system,” Surf. Coat. Tech. 267, 53–58 (2015).
[Crossref]

M. Vergöhl, D. Rademacher, and A. Pflug, “Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system,” Surf. Coat. Tech. 241, 38–44 (2014).
[Crossref]

D. Rademacher, T. Zickenrott, and M. Vergöhl, “Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration,” Thin Solid Films 532, 98–105 (2013).
[Crossref]

Rao, Y. L.

V. Anandan, Y. L. Rao, and G. Zhang, “Nanopillar array structures for enhancing biosensing performance,” Int. J. Nanomedicine 1(1), 73–80 (2006).
[Crossref] [PubMed]

Rasson, J.

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

Rendell, R. W.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Rindzevicius, T.

K. Wu, T. Li, M. S. Schmidt, T. Rindzevicius, A. Boisen, and S. Ndoni, “Gold Nanoparticles Sliding on Recyclable Nanohoodoos-Engineered for Surface-Enhanced Raman Spectroscopy,” Adv. Funct. Mater. 28(2), 1704818 (2018).
[Crossref]

A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
[Crossref] [PubMed]

Saito, M.

M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
[Crossref] [PubMed]

Santamaría, B.

Sanza, F. J.

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. Fernández, P. Ciaurriz, F. J. Sanza, B. Santamaría, M. V. Maigler, and M. F. Laguna, “Resonant nanopillars arrays for label-free biosensing,” Opt. Lett. 41(23), 5430–5433 (2016).
[Crossref] [PubMed]

I. Cornago, A. L. Hernández, R. Casquel, M. Holgado, M. F. Laguna, F. J. Sanza, and J. Bravo, “Bulk sensing performance comparison between silicon dioxide and resonant high aspect ratio nanopillars arrays fabricated by means of interference lithography,” Opt. Mater. Express 6(7), 2264 (2016).
[Crossref]

A. L. Hernández, R. Casquel, M. Holgado, I. Cornago, F. J. Sanza, B. Santamaría, M. Maigler, F. Fernández, A. Lavín, and M. F. Laguna, “Arrays of resonant nanopillars for biochemical sensing,” Opt. Lett. 40(10), 2370–2372 (2015).
[Crossref] [PubMed]

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Schmidt, M. S.

K. Wu, T. Li, M. S. Schmidt, T. Rindzevicius, A. Boisen, and S. Ndoni, “Gold Nanoparticles Sliding on Recyclable Nanohoodoos-Engineered for Surface-Enhanced Raman Spectroscopy,” Adv. Funct. Mater. 28(2), 1704818 (2018).
[Crossref]

A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
[Crossref] [PubMed]

M. S. Schmidt, J. Hübner, and A. Boisen, “Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy,” Adv. Mater. 24(10), OP11–OP18 (2012).
[PubMed]

Sepulveda, B.

M.-C. Estevez, M. A. Otte, B. Sepulveda, and L. M. Lechuga, “Trends and challenges of refractometric nanoplasmonic biosensors: A review,” Anal. Chim. Acta 806, 55–73 (2014).
[Crossref] [PubMed]

Sepúlveda, B.

M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011).
[Crossref]

Shahid, N.

S. Naureen, N. Shahid, A. Dev, and S. Anand, “Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si,” Nanotechnology 24(22), 225301 (2013).
[Crossref] [PubMed]

Shirey, L.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Shiu, J.-Y.

C.-W. Kuo, J.-Y. Shiu, and P. Chen, “Size- and Shape-Controlled Fabrication of Large-Area Periodic Nanopillar Arrays,” Chem. Mater. 15(15), 2917–2920 (2003).
[Crossref]

Siddique, R. H.

Starkey, T. A.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Surman, C.

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Suzuki, Y.

Y. Suzuki and K. Yokoyama, “Construction of a more sensitive fluorescence sensing material for the detection of vascular endothelial growth factor, a biomarker for angiogenesis, prepared by combining a fluorescent peptide and a nanopillar substrate,” Biosens. Bioelectron. 26(8), 3696–3699 (2011).
[Crossref] [PubMed]

Tallier, G.

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

Tamiya, E.

M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
[Crossref] [PubMed]

Tang, Z.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Thilsted, A. H.

A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
[Crossref] [PubMed]

Tippets, C. A.

C. A. Tippets, Y. Fu, A.-M. Jackson, E. U. Donev, and R. Lopez, “Reproduction and optical analysis of Morpho -inspired polymeric nanostructures,” J. Opt. 18(6), 065105 (2016).
[Crossref]

Ukaegbu, M.

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Utturkar, Y.

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Vasudev, M.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Vergöhl, M.

M. Vergöhl, S. Bruns, D. Rademacher, and G. Bräuer, “Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system,” Surf. Coat. Tech. 267, 53–58 (2015).
[Crossref]

M. Vergöhl, D. Rademacher, and A. Pflug, “Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system,” Surf. Coat. Tech. 241, 38–44 (2014).
[Crossref]

D. Rademacher, T. Zickenrott, and M. Vergöhl, “Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration,” Thin Solid Films 532, 98–105 (2013).
[Crossref]

Vert, A.

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Vukusic, P.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Wang, J.

W. Li, M. Hu, P. Ge, J. Wang, and Y. Guo, “Humidity sensing properties of morphology-controlled ordered silicon nanopillar,” Appl. Surf. Sci. 317, 970–973 (2014).
[Crossref]

Wu, K.

K. Wu, T. Li, M. S. Schmidt, T. Rindzevicius, A. Boisen, and S. Ndoni, “Gold Nanoparticles Sliding on Recyclable Nanohoodoos-Engineered for Surface-Enhanced Raman Spectroscopy,” Adv. Funct. Mater. 28(2), 1704818 (2018).
[Crossref]

A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
[Crossref] [PubMed]

Yamaguchi, Y.

M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
[Crossref] [PubMed]

Yamanaka, K.

M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
[Crossref] [PubMed]

Yan, X.-N.

L.-J. Bie, X.-N. Yan, J. Yin, Y.-Q. Duan, and Z.-H. Yuan, “Nanopillar ZnO gas sensor for hydrogen and ethanol,” Sens. Actuators B Chem. 126(2), 604–608 (2007).
[Crossref]

Yin, J.

L.-J. Bie, X.-N. Yan, J. Yin, Y.-Q. Duan, and Z.-H. Yuan, “Nanopillar ZnO gas sensor for hydrogen and ethanol,” Sens. Actuators B Chem. 126(2), 604–608 (2007).
[Crossref]

Yokoyama, K.

Y. Suzuki and K. Yokoyama, “Construction of a more sensitive fluorescence sensing material for the detection of vascular endothelial growth factor, a biomarker for angiogenesis, prepared by combining a fluorescent peptide and a nanopillar substrate,” Biosens. Bioelectron. 26(8), 3696–3699 (2011).
[Crossref] [PubMed]

Yuan, Z.-H.

L.-J. Bie, X.-N. Yan, J. Yin, Y.-Q. Duan, and Z.-H. Yuan, “Nanopillar ZnO gas sensor for hydrogen and ethanol,” Sens. Actuators B Chem. 126(2), 604–608 (2007).
[Crossref]

Zalyubovskiy, S.

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Zhang, G.

V. Anandan, Y. L. Rao, and G. Zhang, “Nanopillar array structures for enhancing biosensing performance,” Int. J. Nanomedicine 1(1), 73–80 (2006).
[Crossref] [PubMed]

Zhong, S.

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Zickenrott, T.

D. Rademacher, T. Zickenrott, and M. Vergöhl, “Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration,” Thin Solid Films 532, 98–105 (2013).
[Crossref]

Zór, K.

A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
[Crossref] [PubMed]

ACS Nano (1)

J. D. Caldwell, O. Glembocki, F. J. Bezares, N. D. Bassim, R. W. Rendell, M. Feygelson, M. Ukaegbu, R. Kasica, L. Shirey, and C. Hosten, “Plasmonic Nanopillar Arrays for Large-Area, High-Enhancement Surface-Enhanced Raman Scattering Sensors,” ACS Nano 5(5), 4046–4055 (2011).
[Crossref] [PubMed]

Adv. Funct. Mater. (1)

K. Wu, T. Li, M. S. Schmidt, T. Rindzevicius, A. Boisen, and S. Ndoni, “Gold Nanoparticles Sliding on Recyclable Nanohoodoos-Engineered for Surface-Enhanced Raman Spectroscopy,” Adv. Funct. Mater. 28(2), 1704818 (2018).
[Crossref]

Adv. Mater. (1)

M. S. Schmidt, J. Hübner, and A. Boisen, “Large area fabrication of leaning silicon nanopillars for surface enhanced Raman spectroscopy,” Adv. Mater. 24(10), OP11–OP18 (2012).
[PubMed]

Anal. Chem. (1)

M. Saito, A. Kitamura, M. Murahashi, K. Yamanaka, Q. Hoa, Y. Yamaguchi, and E. Tamiya, “Novel Gold-Capped Nanopillars Imprinted on a Polymer Film for Highly Sensitive Plasmonic Biosensing,” Anal. Chem. 84(13), 5494–5500 (2012).
[Crossref] [PubMed]

Anal. Chim. Acta (1)

M.-C. Estevez, M. A. Otte, B. Sepulveda, and L. M. Lechuga, “Trends and challenges of refractometric nanoplasmonic biosensors: A review,” Anal. Chim. Acta 806, 55–73 (2014).
[Crossref] [PubMed]

Appl. Surf. Sci. (1)

W. Li, M. Hu, P. Ge, J. Wang, and Y. Guo, “Humidity sensing properties of morphology-controlled ordered silicon nanopillar,” Appl. Surf. Sci. 317, 970–973 (2014).
[Crossref]

Bioinspir. Biomim. (1)

O. Poncelet, G. Tallier, S. R. Mouchet, A. Crahay, J. Rasson, R. Kotipalli, O. Deparis, and L. A. Francis, “Vapour sensitivity of an ALD hierarchical photonic structure inspired by Morpho,” Bioinspir. Biomim. 11(3), 036011 (2016).
[Crossref] [PubMed]

Biosens. Bioelectron. (3)

F. J. Sanza, M. Holgado, F. J. Ortega, R. Casquel, D. López-Romero, M. J. Bañuls, M. F. Laguna, C. A. Barrios, R. Puchades, and A. Maquieira, “Bio-Photonic Sensing Cells over transparent substrates for anti-gestrinone antibodies biosensing,” Biosens. Bioelectron. 26(12), 4842–4847 (2011).
[Crossref] [PubMed]

Y. Suzuki and K. Yokoyama, “Construction of a more sensitive fluorescence sensing material for the detection of vascular endothelial growth factor, a biomarker for angiogenesis, prepared by combining a fluorescent peptide and a nanopillar substrate,” Biosens. Bioelectron. 26(8), 3696–3699 (2011).
[Crossref] [PubMed]

M. Holgado, C. A. Barrios, F. J. Ortega, F. J. Sanza, R. Casquel, M. F. Laguna, M. J. Bañuls, D. López-Romero, R. Puchades, and A. Maquieira, “Label-free biosensing by means of periodic lattices of high aspect ratio SU-8 nano-pillars,” Biosens. Bioelectron. 25(12), 2553–2558 (2010).
[Crossref] [PubMed]

Biosensors (Basel) (1)

F. J. Ortega, M. J. Bañuls, F. J. Sanza, R. Casquel, M. F. Laguna, M. Holgado, D. López-Romero, C. A. Barrios, Á. Maquieira, and R. Puchades, “Biomolecular interaction analysis of gestrinone-anti-gestrinone using arrays of high aspect ratio SU-8 nanopillars,” Biosensors (Basel) 2(3), 291–304 (2012).
[Crossref] [PubMed]

Chem. Mater. (1)

C.-W. Kuo, J.-Y. Shiu, and P. Chen, “Size- and Shape-Controlled Fabrication of Large-Area Periodic Nanopillar Arrays,” Chem. Mater. 15(15), 2917–2920 (2003).
[Crossref]

Int. J. Nanomedicine (1)

V. Anandan, Y. L. Rao, and G. Zhang, “Nanopillar array structures for enhancing biosensing performance,” Int. J. Nanomedicine 1(1), 73–80 (2006).
[Crossref] [PubMed]

J. Nanosci. Nanotechnol. (1)

V. Kugel and H.-F. Ji, “Nanopillars for sensing,” J. Nanosci. Nanotechnol. 14(9), 6469–6477 (2014).
[Crossref] [PubMed]

J. Opt. (1)

C. A. Tippets, Y. Fu, A.-M. Jackson, E. U. Donev, and R. Lopez, “Reproduction and optical analysis of Morpho -inspired polymeric nanostructures,” J. Opt. 18(6), 065105 (2016).
[Crossref]

J. Phys. Chem. C (1)

M. A. Otte, M.-C. Estévez, L. G. Carrascosa, A. B. González-Guerrero, L. M. Lechuga, and B. Sepúlveda, “Improved Biosensing Capability with Novel Suspended Nanodisks,” J. Phys. Chem. C 115(13), 5344–5351 (2011).
[Crossref]

Nanotechnology (1)

S. Naureen, N. Shahid, A. Dev, and S. Anand, “Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si,” Nanotechnology 24(22), 225301 (2013).
[Crossref] [PubMed]

Nat. Commun. (1)

R. A. Potyrailo, R. K. Bonam, J. G. Hartley, T. A. Starkey, P. Vukusic, M. Vasudev, T. Bunning, R. R. Naik, Z. Tang, M. A. Palacios, M. Larsen, L. A. Le Tarte, J. C. Grande, S. Zhong, and T. Deng, “Towards outperforming conventional sensor arrays with fabricated individual photonic vapour sensors inspired by Morpho butterflies,” Nat. Commun. 6(1), 7959 (2015).
[Crossref] [PubMed]

Nat. Photonics (1)

A. D. Pris, Y. Utturkar, C. Surman, W. G. Morris, A. Vert, S. Zalyubovskiy, T. Deng, H. T. Ghiradella, and R. A. Potyrailo, “Towards high-speed imaging of infrared photons with bio-inspired nanoarchitectures,” Nat. Photonics 6(3), 195–200 (2012).
[Crossref]

Opt. Express (1)

Opt. Lett. (2)

Opt. Mater. Express (1)

Sens. Actuators B Chem. (2)

V. Canalejas-Tejero, A. López, R. Casquel, M. Holgado, and C. A. Barrios, “Sensitive metal layer-assisted guided-mode resonance SU8 nanopillar array for label-free optical biosensing,” Sens. Actuators B Chem. 226, 204–210 (2016).
[Crossref]

L.-J. Bie, X.-N. Yan, J. Yin, Y.-Q. Duan, and Z.-H. Yuan, “Nanopillar ZnO gas sensor for hydrogen and ethanol,” Sens. Actuators B Chem. 126(2), 604–608 (2007).
[Crossref]

Small (1)

A. H. Thilsted, J. Y. Pan, K. Wu, K. Zór, T. Rindzevicius, M. S. Schmidt, and A. Boisen, “Lithography-Free Fabrication of Silica Nanocylinders with Suspended Gold Nanorings for LSPR-Based Sensing,” Small 12(48), 6745–6752 (2016).
[Crossref] [PubMed]

Surf. Coat. Tech. (2)

M. Vergöhl, D. Rademacher, and A. Pflug, “Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system,” Surf. Coat. Tech. 241, 38–44 (2014).
[Crossref]

M. Vergöhl, S. Bruns, D. Rademacher, and G. Bräuer, “Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system,” Surf. Coat. Tech. 267, 53–58 (2015).
[Crossref]

Thin Solid Films (1)

D. Rademacher, T. Zickenrott, and M. Vergöhl, “Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration,” Thin Solid Films 532, 98–105 (2013).
[Crossref]

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Figures (5)

Fig. 1
Fig. 1 Schematic diagram of the steps involved in the TR-NPs fabrication. The process involves EBL to make arrays of nanoholes, metal deposition, lift-off step, and CHF3/O2 plasma etch.
Fig. 2
Fig. 2 Sketch of the optical measuring setup for liquids. The sample with NPs is placed downside on a cell filled with liquid. Optical interrogation is performed through the transparent quartz substrate using an optical fiber, and reflected light is collected with another optical fiber adjacent to the first one.
Fig. 3
Fig. 3 SEM images of different TR-NPs. (a) Isolated, tiered nanopillar of 600 nm in diameter. (b) TR-NPs are 350 nm wide, pitch 875 nm. (c) TR-NPs are 250 nm wide, pitch 500 nm. (d) Top view of a large uniform area of the same TR-NPs shown in (c). Scale bars equal 500 nm for (a-c) and 10 µm for (d). (a-c) are 85° tilted views.
Fig. 4
Fig. 4 Spectra acquired with a visible spectrometer considering different solvents in contact with a conventional R-NPs array (a) and a TR-NPs with nickel cap array (b). In both cases, there is a resonant minimum peak in the 580-630 nm wavelength range. Minimum peaks regions are enlarged to improve clarity.
Fig. 5
Fig. 5 Linear fitting of the resonant minimum peak position for a conventional R-NPs array (solid line) and a TR-NPs array (dashed line), square lattice and pitch 500 nm in both cases. Bulk sensing tests with different solvents gave values of SB (R-NPs) ~296 nm RIU−1 and SB (TR-NPs) ~379 nm RIU−1, showing a 28% sensitivity increment approximately.

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