Abstract

In the micro-milling repair process of surface defects on KH2PO4 (KDP) optics, residual tool marks are inevitably introduced on repaired surfaces. These tool marks could present great potential risks in lowering laser-induced damage thresholds of repaired KDP optics, which has not been reported in the previous works. In this work, the formation process of micro-milled tool marks was initially modeled and then the effect of these residual marks on the optical performance of KDP optics was investigated theoretically and experimentally. A 3D surface generation model for repair contours is proposed to predict the profiles of residual tool marks on micro ball-end milled surfaces, and then a numerical FEM model adopting the calculated profiles of residual tool marks is established to investigate the light intensification inside KDP optics based on electromagnetic theory. The relationship between repair machining processes, tool marks profiles and light intensifications as well as laser damage resistance of repaired KDP optics, has been discussed comprehensively and systematically. Practical repair experiments and laser damage tests verified the theoretical results very well. It revealed that the residual height of tool marks can induce apparent diffraction effect, consequently causing severe light intensification inside KDP optics. The micro milling strategies (e.g. a combination of layer-milling and spiral milling paths) can also exert a positive role in improving the laser damage resistance of KDP optics. An optimized repair process flow, adopting layer-milling path as rough milling and employing spiral-milling with path intervals of 10∼15 µm as fine milling, is recommended for the future practical engineering repair of full-aperture KDP optics in ICF facilities.

© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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    [Crossref]
  20. J. Chen, Y. Huang, and M. Chen, “A study of the surface scallop generating mechanism in the ball-end milling process,” Int. J. Mach. Tool Manu. 45(9), 1077–1084 (2005).
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    [Crossref]
  22. F. Peng, J. Wu, Z. Fang, S. Yuan, R. Yan, and Q. Bai, “Modeling and controlling of surface micro-topography feature in micro-ball-end milling,” Int. J. Adv. Manuf. Technol. 67(9-12), 2657–2670 (2013).
    [Crossref]
  23. M. Li, J. Huang, X. Liu, J. Wang, and L. Jia, “Research on surface morphology of the ruled surface in five-axis flank milling,” Int. J. Adv. Manuf. Technol. 94(5-8), 1655–1664 (2018).
    [Crossref]
  24. W. Chen, L. Zheng, W. Xie, K. Yang, and D. Huo, “Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling,” J. Mater. Process. Technol. 266, 339–350 (2019).
    [Crossref]
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    [Crossref]
  26. Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Optimum end milling tool path and machining parameters for micro Laval nozzle manufacturing,” Proc. Inst. Mech. Eng., Part B 231(10), 1703–1712 (2017).
    [Crossref]
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    [Crossref]
  31. D. Zhu, Y. Li, Q. Zhang, J. Wang, and Q. Xu, “Laser induced damage due to scratches in the surface of nonlinear optical crystals KH2PO4 (KDP),” J. Eur. Opt. Soc-Rapid. 13(1), 33 (2017).
    [Crossref]
  32. J. Cheng, M. Chen, W. Liao, H. Wang, Y. Xiao, and M. Li, “Fabrication of spherical mitigation pit on KH2PO4 crystal by micro-milling and modeling of its induced light intensification,” Opt. Express 21(14), 16799–16813 (2013).
    [Crossref]
  33. N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
    [Crossref]
  34. Q. Liu, J. Cheng, Y. Xiao, M. Chen, H. Yang, and J. Wang, “Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling,” Int. J. Adv. Manuf. Technol. 99(9-12), 2777–2788 (2018).
    [Crossref]
  35. N. Chen, M. Chen, Y. Guo, and X. Wang, “Effect of cutting parameters on surface quality in ductile cutting of KDP crystal using self-developed micro PCD ball end mill,” Int. J. Adv. Manuf. Technol. 78(1-4), 221–229 (2015).
    [Crossref]
  36. Q. Liu, J. Cheng, Z. Liao, H. Yang, L. Zhao, and M. Chen, “Incident laser modulation by tool marks on micro-milled KDP crystal surface: Numerical simulation and experimental verification,” Opt. Laser Technol. 119, 105610 (2019).
    [Crossref]
  37. M. Q. Li, “Study on influence of KDP crystal ultra-precision fly-cutting micro/nano-topography on its laser induced damage threshold,” Harbin: Harbin Institute of Technology41–47 (2013).
  38. J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
    [Crossref]
  39. W. Jiang, M. Chen, M. Li, and K. Chen, “Study of the near-field modulation property of microwaviness on a KH2PO4 crystal surface,” Chin. Phys. B 19(6), 064203 (2010).
    [Crossref]
  40. C. L. He and W. J. Zong, “Diffraction effect and its elimination method for diamond-turned optics,” Opt. Express 27(2), 1326–1344 (2019).
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  41. Q. Zhang, Q. Zhao, S. To, B. Guo, and W. Zhai, “Diamond wheel wear mechanism and its impact on the surface generation in parallel diamond grinding of RB-SiC/Si,” Diamond Relat. Mater. 74, 16–23 (2017).
    [Crossref]

2019 (8)

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

S. Zhang, H. Zhang, and W. Zong, “Modeling and simulation on the effect of tool rake angle in diamond turning of KDP crystal,” J. Mater. Process. Technol. 273, 116259 (2019).
[Crossref]

X. Li, B. Liu, C. Yan, C. Liu, and X. Ju, “Structures of retired components and KDP crystals irradiated by high fluence using synchrotron µ-XRF and µ-XRD,” Opt. Mater. Express 9(2), 845–859 (2019).
[Crossref]

X. Cai, X. Lin, G. Li, J. Lu, Z. Hu, and G. Zheng, “Rapid growth and properties of large-aperture 98%-deuterated DKDP crystals,” High Power Laser Sci. Eng. 7, e46 (2019).
[Crossref]

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

W. Chen, L. Zheng, W. Xie, K. Yang, and D. Huo, “Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling,” J. Mater. Process. Technol. 266, 339–350 (2019).
[Crossref]

Q. Liu, J. Cheng, Z. Liao, H. Yang, L. Zhao, and M. Chen, “Incident laser modulation by tool marks on micro-milled KDP crystal surface: Numerical simulation and experimental verification,” Opt. Laser Technol. 119, 105610 (2019).
[Crossref]

C. L. He and W. J. Zong, “Diffraction effect and its elimination method for diamond-turned optics,” Opt. Express 27(2), 1326–1344 (2019).
[Crossref]

2018 (8)

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

W. Chen, W. Xie, D. Huo, and K. Yang, “A novel 3D surface generation model for micro milling based on homogeneous matrix transformation and dynamic regenerative effect,” Int. J. Mech. Sci. 144, 146–157 (2018).
[Crossref]

M. Li, J. Huang, X. Liu, J. Wang, and L. Jia, “Research on surface morphology of the ruled surface in five-axis flank milling,” Int. J. Adv. Manuf. Technol. 94(5-8), 1655–1664 (2018).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, M. Chen, H. Yang, and J. Wang, “Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling,” Int. J. Adv. Manuf. Technol. 99(9-12), 2777–2788 (2018).
[Crossref]

Z. Liu, F. Geng, Y. Li, J. Cheng, H. Yang, Y. Zheng, J. Wang, and Q. Xu, “Study of morphological feature and mechanism of potassium dihydrogen phosphate surface damage under a 351 nm nanosecond laser,” Appl. Opt. 57(35), 10334–10341 (2018).
[Crossref]

Y. Chen, H. Gao, X. Wang, D. Guo, and Z. Liu, “Laser Induced Damage of Potassium Dihydrogen Phosphate (KDP) Optical Crystal Machined by Water Dissolution Ultra-Precision Polishing Method,” Materials 11(3), 419 (2018).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, H. Yang, and M. Chen, “Effect of milling modes on surface integrity of KDP crystal processed by micro ball-end milling,” Proc. CIRP 71, 260–266 (2018).
[Crossref]

W. Gao, J. Ji, C. Wang, L. Wang, Q. Fan, K. Sun, F. Ji, and M. Xu, “Mitigation of subsurface damage in potassium dihydrogen phosphate (KDP) crystals with a novel abrasive-free jet process,” Opt. Mater. Express 8(9), 2625–2635 (2018).
[Crossref]

2017 (7)

D. Wang, T. Li, S. Wang, J. Wang, C. Shen, J. Ding, W. Li, P. Huang, and C. Lu, “Characteristics of nonlinear optical absorption and refraction for KDP and DKDP crystals,” Opt. Mater. Express 7(2), 533–541 (2017).
[Crossref]

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
[Crossref]

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

D. Zhu, Y. Li, Q. Zhang, J. Wang, and Q. Xu, “Laser induced damage due to scratches in the surface of nonlinear optical crystals KH2PO4 (KDP),” J. Eur. Opt. Soc-Rapid. 13(1), 33 (2017).
[Crossref]

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Optimum end milling tool path and machining parameters for micro Laval nozzle manufacturing,” Proc. Inst. Mech. Eng., Part B 231(10), 1703–1712 (2017).
[Crossref]

Q. Zhang, Q. Zhao, S. To, B. Guo, and W. Zhai, “Diamond wheel wear mechanism and its impact on the surface generation in parallel diamond grinding of RB-SiC/Si,” Diamond Relat. Mater. 74, 16–23 (2017).
[Crossref]

2016 (1)

J. Cheng, M. Chen, K. Kafka, D. Austin, J. Wang, Y. Xiao, and E. Chowdhury, “Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification,” AIP Adv. 6(3), 035221 (2016).
[Crossref]

2015 (4)

N. Chen, M. Chen, Y. Guo, and X. Wang, “Effect of cutting parameters on surface quality in ductile cutting of KDP crystal using self-developed micro PCD ball end mill,” Int. J. Adv. Manuf. Technol. 78(1-4), 221–229 (2015).
[Crossref]

Z. Zhu, S. To, and S. Zhang, “Active control of residual tool marks for freeform optics functionalization by novel biaxial servo assisted fly cutting,” Appl. Opt. 54(25), 7656–7662 (2015).
[Crossref]

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Residual surface topology modeling and simulation analysis for micro-machined nozzle,” Int. J. Precis. Eng. Man. 16(1), 157–162 (2015).
[Crossref]

Y. Xiao, M. Chen, Y. Yang, and J. Cheng, “Research on the critical condition of Brittle-Ductile Transition about Micro-Milling of KDP crystal and experimental verification,” Int. J. Precis. Eng. Man. 16(2), 351–359 (2015).
[Crossref]

2014 (1)

2013 (3)

2012 (2)

B. Corral, J. Vivancos Calvet, and A. Domínguez Fernández, “Surface topography in ball-end milling processes as a function of feed per tooth and radial depth of cut,” Int. J. Mach. Tool Manu. 53(1), 151–159 (2012).
[Crossref]

J. Stolz Christopher, “The National Ignition Facility: the path to a carbon-free energy future,” Philos. Trans. R. Soc., A 370(1973), 4115–4129 (2012).
[Crossref]

2010 (1)

W. Jiang, M. Chen, M. Li, and K. Chen, “Study of the near-field modulation property of microwaviness on a KH2PO4 crystal surface,” Chin. Phys. B 19(6), 064203 (2010).
[Crossref]

2008 (1)

E. I. Moses and W. R. Meier, “Preparing for ignition experiments on the National Ignition Facility,” Fusion Eng. Des. 83(7-9), 997–1000 (2008).
[Crossref]

2007 (1)

P. Geraghty, W. Carr, V. Draggoo, R. Hackel, C. Mailhiot, and M. Norton, “Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micro-machining ball end mill contouring,” Proc. SPIE 6403, 64030Q (2007)..
[Crossref]

2005 (1)

J. Chen, Y. Huang, and M. Chen, “A study of the surface scallop generating mechanism in the ball-end milling process,” Int. J. Mach. Tool Manu. 45(9), 1077–1084 (2005).
[Crossref]

2003 (1)

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

1973 (1)

An, C.

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
[Crossref]

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

Austin, D.

J. Cheng, M. Chen, K. Kafka, D. Austin, J. Wang, Y. Xiao, and E. Chowdhury, “Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification,” AIP Adv. 6(3), 035221 (2016).
[Crossref]

Bai, Q.

F. Peng, J. Wu, Z. Fang, S. Yuan, R. Yan, and Q. Bai, “Modeling and controlling of surface micro-topography feature in micro-ball-end milling,” Int. J. Adv. Manuf. Technol. 67(9-12), 2657–2670 (2013).
[Crossref]

Boling, N. L.

Brusasco, R. M.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Burnham, A. K.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Cai, X.

X. Cai, X. Lin, G. Li, J. Lu, Z. Hu, and G. Zheng, “Rapid growth and properties of large-aperture 98%-deuterated DKDP crystals,” High Power Laser Sci. Eng. 7, e46 (2019).
[Crossref]

Cai, Y.

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Optimum end milling tool path and machining parameters for micro Laval nozzle manufacturing,” Proc. Inst. Mech. Eng., Part B 231(10), 1703–1712 (2017).
[Crossref]

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Residual surface topology modeling and simulation analysis for micro-machined nozzle,” Int. J. Precis. Eng. Man. 16(1), 157–162 (2015).
[Crossref]

Carr, W.

P. Geraghty, W. Carr, V. Draggoo, R. Hackel, C. Mailhiot, and M. Norton, “Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micro-machining ball end mill contouring,” Proc. SPIE 6403, 64030Q (2007)..
[Crossref]

Chen, J.

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

J. Chen, Y. Huang, and M. Chen, “A study of the surface scallop generating mechanism in the ball-end milling process,” Int. J. Mach. Tool Manu. 45(9), 1077–1084 (2005).
[Crossref]

Chen, K.

W. Jiang, M. Chen, M. Li, and K. Chen, “Study of the near-field modulation property of microwaviness on a KH2PO4 crystal surface,” Chin. Phys. B 19(6), 064203 (2010).
[Crossref]

Chen, M.

Q. Liu, J. Cheng, Z. Liao, H. Yang, L. Zhao, and M. Chen, “Incident laser modulation by tool marks on micro-milled KDP crystal surface: Numerical simulation and experimental verification,” Opt. Laser Technol. 119, 105610 (2019).
[Crossref]

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, M. Chen, H. Yang, and J. Wang, “Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling,” Int. J. Adv. Manuf. Technol. 99(9-12), 2777–2788 (2018).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, H. Yang, and M. Chen, “Effect of milling modes on surface integrity of KDP crystal processed by micro ball-end milling,” Proc. CIRP 71, 260–266 (2018).
[Crossref]

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
[Crossref]

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

J. Cheng, M. Chen, K. Kafka, D. Austin, J. Wang, Y. Xiao, and E. Chowdhury, “Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification,” AIP Adv. 6(3), 035221 (2016).
[Crossref]

N. Chen, M. Chen, Y. Guo, and X. Wang, “Effect of cutting parameters on surface quality in ductile cutting of KDP crystal using self-developed micro PCD ball end mill,” Int. J. Adv. Manuf. Technol. 78(1-4), 221–229 (2015).
[Crossref]

Y. Xiao, M. Chen, Y. Yang, and J. Cheng, “Research on the critical condition of Brittle-Ductile Transition about Micro-Milling of KDP crystal and experimental verification,” Int. J. Precis. Eng. Man. 16(2), 351–359 (2015).
[Crossref]

J. Cheng, M. Chen, W. Liao, H. Wang, J. Wang, Y. Xiao, and M. Li, “Influence of surface cracks on laser-induced damage resistance of brittle KH2PO4 crystal,” Opt. Express 22(23), 28740–28755 (2014).
[Crossref]

J. Cheng, M. Chen, W. Liao, H. Wang, Y. Xiao, and M. Li, “Fabrication of spherical mitigation pit on KH2PO4 crystal by micro-milling and modeling of its induced light intensification,” Opt. Express 21(14), 16799–16813 (2013).
[Crossref]

W. Jiang, M. Chen, M. Li, and K. Chen, “Study of the near-field modulation property of microwaviness on a KH2PO4 crystal surface,” Chin. Phys. B 19(6), 064203 (2010).
[Crossref]

J. Chen, Y. Huang, and M. Chen, “A study of the surface scallop generating mechanism in the ball-end milling process,” Int. J. Mach. Tool Manu. 45(9), 1077–1084 (2005).
[Crossref]

Chen, N.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

N. Chen, M. Chen, Y. Guo, and X. Wang, “Effect of cutting parameters on surface quality in ductile cutting of KDP crystal using self-developed micro PCD ball end mill,” Int. J. Adv. Manuf. Technol. 78(1-4), 221–229 (2015).
[Crossref]

Chen, W.

W. Chen, L. Zheng, W. Xie, K. Yang, and D. Huo, “Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling,” J. Mater. Process. Technol. 266, 339–350 (2019).
[Crossref]

W. Chen, W. Xie, D. Huo, and K. Yang, “A novel 3D surface generation model for micro milling based on homogeneous matrix transformation and dynamic regenerative effect,” Int. J. Mech. Sci. 144, 146–157 (2018).
[Crossref]

Chen, Y.

Y. Chen, H. Gao, X. Wang, D. Guo, and Z. Liu, “Laser Induced Damage of Potassium Dihydrogen Phosphate (KDP) Optical Crystal Machined by Water Dissolution Ultra-Precision Polishing Method,” Materials 11(3), 419 (2018).
[Crossref]

Cheng, J.

Q. Liu, J. Cheng, Z. Liao, H. Yang, L. Zhao, and M. Chen, “Incident laser modulation by tool marks on micro-milled KDP crystal surface: Numerical simulation and experimental verification,” Opt. Laser Technol. 119, 105610 (2019).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, M. Chen, H. Yang, and J. Wang, “Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling,” Int. J. Adv. Manuf. Technol. 99(9-12), 2777–2788 (2018).
[Crossref]

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

Z. Liu, F. Geng, Y. Li, J. Cheng, H. Yang, Y. Zheng, J. Wang, and Q. Xu, “Study of morphological feature and mechanism of potassium dihydrogen phosphate surface damage under a 351 nm nanosecond laser,” Appl. Opt. 57(35), 10334–10341 (2018).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, H. Yang, and M. Chen, “Effect of milling modes on surface integrity of KDP crystal processed by micro ball-end milling,” Proc. CIRP 71, 260–266 (2018).
[Crossref]

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
[Crossref]

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

J. Cheng, M. Chen, K. Kafka, D. Austin, J. Wang, Y. Xiao, and E. Chowdhury, “Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification,” AIP Adv. 6(3), 035221 (2016).
[Crossref]

Y. Xiao, M. Chen, Y. Yang, and J. Cheng, “Research on the critical condition of Brittle-Ductile Transition about Micro-Milling of KDP crystal and experimental verification,” Int. J. Precis. Eng. Man. 16(2), 351–359 (2015).
[Crossref]

J. Cheng, M. Chen, W. Liao, H. Wang, J. Wang, Y. Xiao, and M. Li, “Influence of surface cracks on laser-induced damage resistance of brittle KH2PO4 crystal,” Opt. Express 22(23), 28740–28755 (2014).
[Crossref]

J. Cheng, M. Chen, W. Liao, H. Wang, Y. Xiao, and M. Li, “Fabrication of spherical mitigation pit on KH2PO4 crystal by micro-milling and modeling of its induced light intensification,” Opt. Express 21(14), 16799–16813 (2013).
[Crossref]

Chowdhury, E.

J. Cheng, M. Chen, K. Kafka, D. Austin, J. Wang, Y. Xiao, and E. Chowdhury, “Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification,” AIP Adv. 6(3), 035221 (2016).
[Crossref]

Corral, B.

B. Corral, J. Vivancos Calvet, and A. Domínguez Fernández, “Surface topography in ball-end milling processes as a function of feed per tooth and radial depth of cut,” Int. J. Mach. Tool Manu. 53(1), 151–159 (2012).
[Crossref]

Crisp, M. D.

Ding, J.

Domínguez Fernández, A.

B. Corral, J. Vivancos Calvet, and A. Domínguez Fernández, “Surface topography in ball-end milling processes as a function of feed per tooth and radial depth of cut,” Int. J. Mach. Tool Manu. 53(1), 151–159 (2012).
[Crossref]

Donohue, E. E.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Draggoo, V.

P. Geraghty, W. Carr, V. Draggoo, R. Hackel, C. Mailhiot, and M. Norton, “Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micro-machining ball end mill contouring,” Proc. SPIE 6403, 64030Q (2007)..
[Crossref]

Dubé, G.

Fan, Q.

Fang, Z.

F. Peng, J. Wu, Z. Fang, S. Yuan, R. Yan, and Q. Bai, “Modeling and controlling of surface micro-topography feature in micro-ball-end milling,” Int. J. Adv. Manuf. Technol. 67(9-12), 2657–2670 (2013).
[Crossref]

Gao, H.

Y. Chen, H. Gao, X. Wang, D. Guo, and Z. Liu, “Laser Induced Damage of Potassium Dihydrogen Phosphate (KDP) Optical Crystal Machined by Water Dissolution Ultra-Precision Polishing Method,” Materials 11(3), 419 (2018).
[Crossref]

Gao, W.

Geng, F.

Geraghty, P.

P. Geraghty, W. Carr, V. Draggoo, R. Hackel, C. Mailhiot, and M. Norton, “Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micro-machining ball end mill contouring,” Proc. SPIE 6403, 64030Q (2007)..
[Crossref]

Grundler, W.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Guo, B.

Q. Zhang, Q. Zhao, S. To, B. Guo, and W. Zhai, “Diamond wheel wear mechanism and its impact on the surface generation in parallel diamond grinding of RB-SiC/Si,” Diamond Relat. Mater. 74, 16–23 (2017).
[Crossref]

Guo, D.

Y. Chen, H. Gao, X. Wang, D. Guo, and Z. Liu, “Laser Induced Damage of Potassium Dihydrogen Phosphate (KDP) Optical Crystal Machined by Water Dissolution Ultra-Precision Polishing Method,” Materials 11(3), 419 (2018).
[Crossref]

Guo, Y.

N. Chen, M. Chen, Y. Guo, and X. Wang, “Effect of cutting parameters on surface quality in ductile cutting of KDP crystal using self-developed micro PCD ball end mill,” Int. J. Adv. Manuf. Technol. 78(1-4), 221–229 (2015).
[Crossref]

Hackel, R.

P. Geraghty, W. Carr, V. Draggoo, R. Hackel, C. Mailhiot, and M. Norton, “Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micro-machining ball end mill contouring,” Proc. SPIE 6403, 64030Q (2007)..
[Crossref]

He, C. L.

He, N.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

Hrubesh, L. W.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Hu, K.

Hu, Z.

X. Cai, X. Lin, G. Li, J. Lu, Z. Hu, and G. Zheng, “Rapid growth and properties of large-aperture 98%-deuterated DKDP crystals,” High Power Laser Sci. Eng. 7, e46 (2019).
[Crossref]

Huang, J.

M. Li, J. Huang, X. Liu, J. Wang, and L. Jia, “Research on surface morphology of the ruled surface in five-axis flank milling,” Int. J. Adv. Manuf. Technol. 94(5-8), 1655–1664 (2018).
[Crossref]

Huang, P.

Huang, Y.

J. Chen, Y. Huang, and M. Chen, “A study of the surface scallop generating mechanism in the ball-end milling process,” Int. J. Mach. Tool Manu. 45(9), 1077–1084 (2005).
[Crossref]

Huo, D.

W. Chen, L. Zheng, W. Xie, K. Yang, and D. Huo, “Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling,” J. Mater. Process. Technol. 266, 339–350 (2019).
[Crossref]

W. Chen, W. Xie, D. Huo, and K. Yang, “A novel 3D surface generation model for micro milling based on homogeneous matrix transformation and dynamic regenerative effect,” Int. J. Mech. Sci. 144, 146–157 (2018).
[Crossref]

Ji, F.

Ji, J.

Jia, L.

M. Li, J. Huang, X. Liu, J. Wang, and L. Jia, “Research on surface morphology of the ruled surface in five-axis flank milling,” Int. J. Adv. Manuf. Technol. 94(5-8), 1655–1664 (2018).
[Crossref]

Jiang, W.

W. Jiang, M. Chen, M. Li, and K. Chen, “Study of the near-field modulation property of microwaviness on a KH2PO4 crystal surface,” Chin. Phys. B 19(6), 064203 (2010).
[Crossref]

Ju, X.

Kafka, K.

J. Cheng, M. Chen, K. Kafka, D. Austin, J. Wang, Y. Xiao, and E. Chowdhury, “Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification,” AIP Adv. 6(3), 035221 (2016).
[Crossref]

Li, G.

X. Cai, X. Lin, G. Li, J. Lu, Z. Hu, and G. Zheng, “Rapid growth and properties of large-aperture 98%-deuterated DKDP crystals,” High Power Laser Sci. Eng. 7, e46 (2019).
[Crossref]

Li, L.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

Li, M.

M. Li, J. Huang, X. Liu, J. Wang, and L. Jia, “Research on surface morphology of the ruled surface in five-axis flank milling,” Int. J. Adv. Manuf. Technol. 94(5-8), 1655–1664 (2018).
[Crossref]

J. Cheng, M. Chen, W. Liao, H. Wang, J. Wang, Y. Xiao, and M. Li, “Influence of surface cracks on laser-induced damage resistance of brittle KH2PO4 crystal,” Opt. Express 22(23), 28740–28755 (2014).
[Crossref]

J. Cheng, M. Chen, W. Liao, H. Wang, Y. Xiao, and M. Li, “Fabrication of spherical mitigation pit on KH2PO4 crystal by micro-milling and modeling of its induced light intensification,” Opt. Express 21(14), 16799–16813 (2013).
[Crossref]

W. Jiang, M. Chen, M. Li, and K. Chen, “Study of the near-field modulation property of microwaviness on a KH2PO4 crystal surface,” Chin. Phys. B 19(6), 064203 (2010).
[Crossref]

Li, M. Q.

M. Q. Li, “Study on influence of KDP crystal ultra-precision fly-cutting micro/nano-topography on its laser induced damage threshold,” Harbin: Harbin Institute of Technology41–47 (2013).

Li, P.

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

Li, T.

Li, W.

Li, X.

Li, Y.

Z. Liu, F. Geng, Y. Li, J. Cheng, H. Yang, Y. Zheng, J. Wang, and Q. Xu, “Study of morphological feature and mechanism of potassium dihydrogen phosphate surface damage under a 351 nm nanosecond laser,” Appl. Opt. 57(35), 10334–10341 (2018).
[Crossref]

D. Zhu, Y. Li, Q. Zhang, J. Wang, and Q. Xu, “Laser induced damage due to scratches in the surface of nonlinear optical crystals KH2PO4 (KDP),” J. Eur. Opt. Soc-Rapid. 13(1), 33 (2017).
[Crossref]

Liao, W.

Liao, Z.

Q. Liu, J. Cheng, Z. Liao, H. Yang, L. Zhao, and M. Chen, “Incident laser modulation by tool marks on micro-milled KDP crystal surface: Numerical simulation and experimental verification,” Opt. Laser Technol. 119, 105610 (2019).
[Crossref]

Lin, X.

X. Cai, X. Lin, G. Li, J. Lu, Z. Hu, and G. Zheng, “Rapid growth and properties of large-aperture 98%-deuterated DKDP crystals,” High Power Laser Sci. Eng. 7, e46 (2019).
[Crossref]

Liu, B.

Liu, C.

Liu, Q.

Q. Liu, J. Cheng, Z. Liao, H. Yang, L. Zhao, and M. Chen, “Incident laser modulation by tool marks on micro-milled KDP crystal surface: Numerical simulation and experimental verification,” Opt. Laser Technol. 119, 105610 (2019).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, M. Chen, H. Yang, and J. Wang, “Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling,” Int. J. Adv. Manuf. Technol. 99(9-12), 2777–2788 (2018).
[Crossref]

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, H. Yang, and M. Chen, “Effect of milling modes on surface integrity of KDP crystal processed by micro ball-end milling,” Proc. CIRP 71, 260–266 (2018).
[Crossref]

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
[Crossref]

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

Z. Zhu, X. Zhou, D. Luo, and Q. Liu, “Development of pseudo-random diamond turning method for fabricating freeform optics with scattering homogenization,” Opt. Express 21(23), 28469–28482 (2013).
[Crossref]

Liu, T.

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

Liu, X.

M. Li, J. Huang, X. Liu, J. Wang, and L. Jia, “Research on surface morphology of the ruled surface in five-axis flank milling,” Int. J. Adv. Manuf. Technol. 94(5-8), 1655–1664 (2018).
[Crossref]

Liu, Z.

Z. Liu, F. Geng, Y. Li, J. Cheng, H. Yang, Y. Zheng, J. Wang, and Q. Xu, “Study of morphological feature and mechanism of potassium dihydrogen phosphate surface damage under a 351 nm nanosecond laser,” Appl. Opt. 57(35), 10334–10341 (2018).
[Crossref]

Y. Chen, H. Gao, X. Wang, D. Guo, and Z. Liu, “Laser Induced Damage of Potassium Dihydrogen Phosphate (KDP) Optical Crystal Machined by Water Dissolution Ultra-Precision Polishing Method,” Materials 11(3), 419 (2018).
[Crossref]

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
[Crossref]

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Optimum end milling tool path and machining parameters for micro Laval nozzle manufacturing,” Proc. Inst. Mech. Eng., Part B 231(10), 1703–1712 (2017).
[Crossref]

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Residual surface topology modeling and simulation analysis for micro-machined nozzle,” Int. J. Precis. Eng. Man. 16(1), 157–162 (2015).
[Crossref]

Long, K.

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

Lu, C.

Lu, J.

X. Cai, X. Lin, G. Li, J. Lu, Z. Hu, and G. Zheng, “Rapid growth and properties of large-aperture 98%-deuterated DKDP crystals,” High Power Laser Sci. Eng. 7, e46 (2019).
[Crossref]

Luo, D.

Ma, W.

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

Mailhiot, C.

P. Geraghty, W. Carr, V. Draggoo, R. Hackel, C. Mailhiot, and M. Norton, “Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micro-machining ball end mill contouring,” Proc. SPIE 6403, 64030Q (2007)..
[Crossref]

Meier, W. R.

E. I. Moses and W. R. Meier, “Preparing for ignition experiments on the National Ignition Facility,” Fusion Eng. Des. 83(7-9), 997–1000 (2008).
[Crossref]

Molander, W. A.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Moses, E. I.

E. I. Moses and W. R. Meier, “Preparing for ignition experiments on the National Ignition Facility,” Fusion Eng. Des. 83(7-9), 997–1000 (2008).
[Crossref]

Norton, M.

P. Geraghty, W. Carr, V. Draggoo, R. Hackel, C. Mailhiot, and M. Norton, “Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micro-machining ball end mill contouring,” Proc. SPIE 6403, 64030Q (2007)..
[Crossref]

Norton, M. A.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Nostrand, M. C.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Pei, G.

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

Pei, X.

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

Peng, F.

F. Peng, J. Wu, Z. Fang, S. Yuan, R. Yan, and Q. Bai, “Modeling and controlling of surface micro-topography feature in micro-ball-end milling,” Int. J. Adv. Manuf. Technol. 67(9-12), 2657–2670 (2013).
[Crossref]

Qian, J.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

Quan, X.

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

Reynaerts, D.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

Rong, Y.

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

Shen, C.

Shi, Z.

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Optimum end milling tool path and machining parameters for micro Laval nozzle manufacturing,” Proc. Inst. Mech. Eng., Part B 231(10), 1703–1712 (2017).
[Crossref]

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Residual surface topology modeling and simulation analysis for micro-machined nozzle,” Int. J. Precis. Eng. Man. 16(1), 157–162 (2015).
[Crossref]

Shirk, M. D.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Song, Q.

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Optimum end milling tool path and machining parameters for micro Laval nozzle manufacturing,” Proc. Inst. Mech. Eng., Part B 231(10), 1703–1712 (2017).
[Crossref]

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Residual surface topology modeling and simulation analysis for micro-machined nozzle,” Int. J. Precis. Eng. Man. 16(1), 157–162 (2015).
[Crossref]

Stolz Christopher, J.

J. Stolz Christopher, “The National Ignition Facility: the path to a carbon-free energy future,” Philos. Trans. R. Soc., A 370(1973), 4115–4129 (2012).
[Crossref]

Strodtbeck, S. R.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Sun, K.

Tan, J.

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

Thompson, S. L.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Tian, M.

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

To, S.

Q. Zhang, Q. Zhao, S. To, B. Guo, and W. Zhai, “Diamond wheel wear mechanism and its impact on the surface generation in parallel diamond grinding of RB-SiC/Si,” Diamond Relat. Mater. 74, 16–23 (2017).
[Crossref]

Z. Zhu, S. To, and S. Zhang, “Active control of residual tool marks for freeform optics functionalization by novel biaxial servo assisted fly cutting,” Appl. Opt. 54(25), 7656–7662 (2015).
[Crossref]

Vivancos Calvet, J.

B. Corral, J. Vivancos Calvet, and A. Domínguez Fernández, “Surface topography in ball-end milling processes as a function of feed per tooth and radial depth of cut,” Int. J. Mach. Tool Manu. 53(1), 151–159 (2012).
[Crossref]

Wan, Y.

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Optimum end milling tool path and machining parameters for micro Laval nozzle manufacturing,” Proc. Inst. Mech. Eng., Part B 231(10), 1703–1712 (2017).
[Crossref]

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Residual surface topology modeling and simulation analysis for micro-machined nozzle,” Int. J. Precis. Eng. Man. 16(1), 157–162 (2015).
[Crossref]

Wang, C.

Wang, D.

Wang, H.

Wang, J.

Q. Liu, J. Cheng, Y. Xiao, M. Chen, H. Yang, and J. Wang, “Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling,” Int. J. Adv. Manuf. Technol. 99(9-12), 2777–2788 (2018).
[Crossref]

Z. Liu, F. Geng, Y. Li, J. Cheng, H. Yang, Y. Zheng, J. Wang, and Q. Xu, “Study of morphological feature and mechanism of potassium dihydrogen phosphate surface damage under a 351 nm nanosecond laser,” Appl. Opt. 57(35), 10334–10341 (2018).
[Crossref]

M. Li, J. Huang, X. Liu, J. Wang, and L. Jia, “Research on surface morphology of the ruled surface in five-axis flank milling,” Int. J. Adv. Manuf. Technol. 94(5-8), 1655–1664 (2018).
[Crossref]

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
[Crossref]

D. Wang, T. Li, S. Wang, J. Wang, C. Shen, J. Ding, W. Li, P. Huang, and C. Lu, “Characteristics of nonlinear optical absorption and refraction for KDP and DKDP crystals,” Opt. Mater. Express 7(2), 533–541 (2017).
[Crossref]

D. Zhu, Y. Li, Q. Zhang, J. Wang, and Q. Xu, “Laser induced damage due to scratches in the surface of nonlinear optical crystals KH2PO4 (KDP),” J. Eur. Opt. Soc-Rapid. 13(1), 33 (2017).
[Crossref]

J. Cheng, M. Chen, K. Kafka, D. Austin, J. Wang, Y. Xiao, and E. Chowdhury, “Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification,” AIP Adv. 6(3), 035221 (2016).
[Crossref]

J. Cheng, M. Chen, W. Liao, H. Wang, J. Wang, Y. Xiao, and M. Li, “Influence of surface cracks on laser-induced damage resistance of brittle KH2PO4 crystal,” Opt. Express 22(23), 28740–28755 (2014).
[Crossref]

Wang, L.

Wang, S.

Wang, X.

Y. Chen, H. Gao, X. Wang, D. Guo, and Z. Liu, “Laser Induced Damage of Potassium Dihydrogen Phosphate (KDP) Optical Crystal Machined by Water Dissolution Ultra-Precision Polishing Method,” Materials 11(3), 419 (2018).
[Crossref]

N. Chen, M. Chen, Y. Guo, and X. Wang, “Effect of cutting parameters on surface quality in ductile cutting of KDP crystal using self-developed micro PCD ball end mill,” Int. J. Adv. Manuf. Technol. 78(1-4), 221–229 (2015).
[Crossref]

Wegner, P. J.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Whitman, P. K.

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Wu, C.

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

Wu, J.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

F. Peng, J. Wu, Z. Fang, S. Yuan, R. Yan, and Q. Bai, “Modeling and controlling of surface micro-topography feature in micro-ball-end milling,” Int. J. Adv. Manuf. Technol. 67(9-12), 2657–2670 (2013).
[Crossref]

Xiao, Y.

Q. Liu, J. Cheng, Y. Xiao, H. Yang, and M. Chen, “Effect of milling modes on surface integrity of KDP crystal processed by micro ball-end milling,” Proc. CIRP 71, 260–266 (2018).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, M. Chen, H. Yang, and J. Wang, “Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling,” Int. J. Adv. Manuf. Technol. 99(9-12), 2777–2788 (2018).
[Crossref]

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

J. Cheng, M. Chen, K. Kafka, D. Austin, J. Wang, Y. Xiao, and E. Chowdhury, “Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification,” AIP Adv. 6(3), 035221 (2016).
[Crossref]

Y. Xiao, M. Chen, Y. Yang, and J. Cheng, “Research on the critical condition of Brittle-Ductile Transition about Micro-Milling of KDP crystal and experimental verification,” Int. J. Precis. Eng. Man. 16(2), 351–359 (2015).
[Crossref]

J. Cheng, M. Chen, W. Liao, H. Wang, J. Wang, Y. Xiao, and M. Li, “Influence of surface cracks on laser-induced damage resistance of brittle KH2PO4 crystal,” Opt. Express 22(23), 28740–28755 (2014).
[Crossref]

J. Cheng, M. Chen, W. Liao, H. Wang, Y. Xiao, and M. Li, “Fabrication of spherical mitigation pit on KH2PO4 crystal by micro-milling and modeling of its induced light intensification,” Opt. Express 21(14), 16799–16813 (2013).
[Crossref]

Xie, W.

W. Chen, L. Zheng, W. Xie, K. Yang, and D. Huo, “Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling,” J. Mater. Process. Technol. 266, 339–350 (2019).
[Crossref]

W. Chen, W. Xie, D. Huo, and K. Yang, “A novel 3D surface generation model for micro milling based on homogeneous matrix transformation and dynamic regenerative effect,” Int. J. Mech. Sci. 144, 146–157 (2018).
[Crossref]

Xu, M.

Xu, Q.

Z. Liu, F. Geng, Y. Li, J. Cheng, H. Yang, Y. Zheng, J. Wang, and Q. Xu, “Study of morphological feature and mechanism of potassium dihydrogen phosphate surface damage under a 351 nm nanosecond laser,” Appl. Opt. 57(35), 10334–10341 (2018).
[Crossref]

D. Zhu, Y. Li, Q. Zhang, J. Wang, and Q. Xu, “Laser induced damage due to scratches in the surface of nonlinear optical crystals KH2PO4 (KDP),” J. Eur. Opt. Soc-Rapid. 13(1), 33 (2017).
[Crossref]

Yan, C.

Yan, R.

F. Peng, J. Wu, Z. Fang, S. Yuan, R. Yan, and Q. Bai, “Modeling and controlling of surface micro-topography feature in micro-ball-end milling,” Int. J. Adv. Manuf. Technol. 67(9-12), 2657–2670 (2013).
[Crossref]

Yang, H.

Q. Liu, J. Cheng, Z. Liao, H. Yang, L. Zhao, and M. Chen, “Incident laser modulation by tool marks on micro-milled KDP crystal surface: Numerical simulation and experimental verification,” Opt. Laser Technol. 119, 105610 (2019).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, M. Chen, H. Yang, and J. Wang, “Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling,” Int. J. Adv. Manuf. Technol. 99(9-12), 2777–2788 (2018).
[Crossref]

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, H. Yang, and M. Chen, “Effect of milling modes on surface integrity of KDP crystal processed by micro ball-end milling,” Proc. CIRP 71, 260–266 (2018).
[Crossref]

Z. Liu, F. Geng, Y. Li, J. Cheng, H. Yang, Y. Zheng, J. Wang, and Q. Xu, “Study of morphological feature and mechanism of potassium dihydrogen phosphate surface damage under a 351 nm nanosecond laser,” Appl. Opt. 57(35), 10334–10341 (2018).
[Crossref]

H. Yang, J. Cheng, M. Chen, J. Wang, Z. Liu, C. An, Y. Zheng, K. Hu, and Q. Liu, “Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling,” Opt. Express 25(15), 18332–18345 (2017).
[Crossref]

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

Yang, K.

W. Chen, L. Zheng, W. Xie, K. Yang, and D. Huo, “Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling,” J. Mater. Process. Technol. 266, 339–350 (2019).
[Crossref]

W. Chen, W. Xie, D. Huo, and K. Yang, “A novel 3D surface generation model for micro milling based on homogeneous matrix transformation and dynamic regenerative effect,” Int. J. Mech. Sci. 144, 146–157 (2018).
[Crossref]

Yang, Y.

Y. Xiao, M. Chen, Y. Yang, and J. Cheng, “Research on the critical condition of Brittle-Ductile Transition about Micro-Milling of KDP crystal and experimental verification,” Int. J. Precis. Eng. Man. 16(2), 351–359 (2015).
[Crossref]

Yuan, S.

F. Peng, J. Wu, Z. Fang, S. Yuan, R. Yan, and Q. Bai, “Modeling and controlling of surface micro-topography feature in micro-ball-end milling,” Int. J. Adv. Manuf. Technol. 67(9-12), 2657–2670 (2013).
[Crossref]

Yuan, X.

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

Zhai, W.

Q. Zhang, Q. Zhao, S. To, B. Guo, and W. Zhai, “Diamond wheel wear mechanism and its impact on the surface generation in parallel diamond grinding of RB-SiC/Si,” Diamond Relat. Mater. 74, 16–23 (2017).
[Crossref]

Zhang, H.

S. Zhang, H. Zhang, and W. Zong, “Modeling and simulation on the effect of tool rake angle in diamond turning of KDP crystal,” J. Mater. Process. Technol. 273, 116259 (2019).
[Crossref]

Zhang, Q.

Q. Zhang, Q. Zhao, S. To, B. Guo, and W. Zhai, “Diamond wheel wear mechanism and its impact on the surface generation in parallel diamond grinding of RB-SiC/Si,” Diamond Relat. Mater. 74, 16–23 (2017).
[Crossref]

D. Zhu, Y. Li, Q. Zhang, J. Wang, and Q. Xu, “Laser induced damage due to scratches in the surface of nonlinear optical crystals KH2PO4 (KDP),” J. Eur. Opt. Soc-Rapid. 13(1), 33 (2017).
[Crossref]

Zhang, S.

S. Zhang, H. Zhang, and W. Zong, “Modeling and simulation on the effect of tool rake angle in diamond turning of KDP crystal,” J. Mater. Process. Technol. 273, 116259 (2019).
[Crossref]

Z. Zhu, S. To, and S. Zhang, “Active control of residual tool marks for freeform optics functionalization by novel biaxial servo assisted fly cutting,” Appl. Opt. 54(25), 7656–7662 (2015).
[Crossref]

Zhang, Z.

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

Zhao, L.

Q. Liu, J. Cheng, Z. Liao, H. Yang, L. Zhao, and M. Chen, “Incident laser modulation by tool marks on micro-milled KDP crystal surface: Numerical simulation and experimental verification,” Opt. Laser Technol. 119, 105610 (2019).
[Crossref]

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

Zhao, Q.

Q. Zhang, Q. Zhao, S. To, B. Guo, and W. Zhai, “Diamond wheel wear mechanism and its impact on the surface generation in parallel diamond grinding of RB-SiC/Si,” Diamond Relat. Mater. 74, 16–23 (2017).
[Crossref]

Zheng, G.

X. Cai, X. Lin, G. Li, J. Lu, Z. Hu, and G. Zheng, “Rapid growth and properties of large-aperture 98%-deuterated DKDP crystals,” High Power Laser Sci. Eng. 7, e46 (2019).
[Crossref]

Zheng, L.

W. Chen, L. Zheng, W. Xie, K. Yang, and D. Huo, “Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling,” J. Mater. Process. Technol. 266, 339–350 (2019).
[Crossref]

Zheng, Y.

Zhou, X.

Zhu, D.

D. Zhu, Y. Li, Q. Zhang, J. Wang, and Q. Xu, “Laser induced damage due to scratches in the surface of nonlinear optical crystals KH2PO4 (KDP),” J. Eur. Opt. Soc-Rapid. 13(1), 33 (2017).
[Crossref]

Zhu, Z.

Zong, W.

S. Zhang, H. Zhang, and W. Zong, “Modeling and simulation on the effect of tool rake angle in diamond turning of KDP crystal,” J. Mater. Process. Technol. 273, 116259 (2019).
[Crossref]

Zong, W. J.

AIP Adv. (1)

J. Cheng, M. Chen, K. Kafka, D. Austin, J. Wang, Y. Xiao, and E. Chowdhury, “Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification,” AIP Adv. 6(3), 035221 (2016).
[Crossref]

Appl. Opt. (3)

Chin. Phys. B (1)

W. Jiang, M. Chen, M. Li, and K. Chen, “Study of the near-field modulation property of microwaviness on a KH2PO4 crystal surface,” Chin. Phys. B 19(6), 064203 (2010).
[Crossref]

Diamond Relat. Mater. (1)

Q. Zhang, Q. Zhao, S. To, B. Guo, and W. Zhai, “Diamond wheel wear mechanism and its impact on the surface generation in parallel diamond grinding of RB-SiC/Si,” Diamond Relat. Mater. 74, 16–23 (2017).
[Crossref]

Fusion Eng. Des. (1)

E. I. Moses and W. R. Meier, “Preparing for ignition experiments on the National Ignition Facility,” Fusion Eng. Des. 83(7-9), 997–1000 (2008).
[Crossref]

High Power Laser Sci. Eng. (1)

X. Cai, X. Lin, G. Li, J. Lu, Z. Hu, and G. Zheng, “Rapid growth and properties of large-aperture 98%-deuterated DKDP crystals,” High Power Laser Sci. Eng. 7, e46 (2019).
[Crossref]

Int. J. Adv. Manuf. Technol. (4)

F. Peng, J. Wu, Z. Fang, S. Yuan, R. Yan, and Q. Bai, “Modeling and controlling of surface micro-topography feature in micro-ball-end milling,” Int. J. Adv. Manuf. Technol. 67(9-12), 2657–2670 (2013).
[Crossref]

M. Li, J. Huang, X. Liu, J. Wang, and L. Jia, “Research on surface morphology of the ruled surface in five-axis flank milling,” Int. J. Adv. Manuf. Technol. 94(5-8), 1655–1664 (2018).
[Crossref]

Q. Liu, J. Cheng, Y. Xiao, M. Chen, H. Yang, and J. Wang, “Effect of tool inclination on surface quality of KDP crystal processed by micro ball-end milling,” Int. J. Adv. Manuf. Technol. 99(9-12), 2777–2788 (2018).
[Crossref]

N. Chen, M. Chen, Y. Guo, and X. Wang, “Effect of cutting parameters on surface quality in ductile cutting of KDP crystal using self-developed micro PCD ball end mill,” Int. J. Adv. Manuf. Technol. 78(1-4), 221–229 (2015).
[Crossref]

Int. J. Mach. Tool Manu. (2)

J. Chen, Y. Huang, and M. Chen, “A study of the surface scallop generating mechanism in the ball-end milling process,” Int. J. Mach. Tool Manu. 45(9), 1077–1084 (2005).
[Crossref]

B. Corral, J. Vivancos Calvet, and A. Domínguez Fernández, “Surface topography in ball-end milling processes as a function of feed per tooth and radial depth of cut,” Int. J. Mach. Tool Manu. 53(1), 151–159 (2012).
[Crossref]

Int. J. Mech. Sci. (2)

W. Chen, W. Xie, D. Huo, and K. Yang, “A novel 3D surface generation model for micro milling based on homogeneous matrix transformation and dynamic regenerative effect,” Int. J. Mech. Sci. 144, 146–157 (2018).
[Crossref]

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

Int. J. Precis. Eng. Man. (2)

Y. Xiao, M. Chen, Y. Yang, and J. Cheng, “Research on the critical condition of Brittle-Ductile Transition about Micro-Milling of KDP crystal and experimental verification,” Int. J. Precis. Eng. Man. 16(2), 351–359 (2015).
[Crossref]

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Residual surface topology modeling and simulation analysis for micro-machined nozzle,” Int. J. Precis. Eng. Man. 16(1), 157–162 (2015).
[Crossref]

J. Eur. Opt. Soc-Rapid. (1)

D. Zhu, Y. Li, Q. Zhang, J. Wang, and Q. Xu, “Laser induced damage due to scratches in the surface of nonlinear optical crystals KH2PO4 (KDP),” J. Eur. Opt. Soc-Rapid. 13(1), 33 (2017).
[Crossref]

J. Mater. Process. Technol. (2)

W. Chen, L. Zheng, W. Xie, K. Yang, and D. Huo, “Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling,” J. Mater. Process. Technol. 266, 339–350 (2019).
[Crossref]

S. Zhang, H. Zhang, and W. Zong, “Modeling and simulation on the effect of tool rake angle in diamond turning of KDP crystal,” J. Mater. Process. Technol. 273, 116259 (2019).
[Crossref]

Mater. Des. (1)

J. Cheng, Y. Xiao, Q. Liu, H. Yang, L. Zhao, M. Chen, J. Tan, W. Liao, J. Chen, and X. Yuan, “Effect of surface scallop tool marks generated in micro-milling repairing process on the optical performance of potassium dihydrogen phosphate crystal,” Mater. Des. 157, 447–456 (2018).
[Crossref]

Materials (1)

Y. Chen, H. Gao, X. Wang, D. Guo, and Z. Liu, “Laser Induced Damage of Potassium Dihydrogen Phosphate (KDP) Optical Crystal Machined by Water Dissolution Ultra-Precision Polishing Method,” Materials 11(3), 419 (2018).
[Crossref]

Opt. Express (5)

Opt. Laser Technol. (2)

Q. Liu, J. Cheng, Z. Liao, H. Yang, L. Zhao, and M. Chen, “Incident laser modulation by tool marks on micro-milled KDP crystal surface: Numerical simulation and experimental verification,” Opt. Laser Technol. 119, 105610 (2019).
[Crossref]

Z. Zhang, H. Wang, X. Quan, G. Pei, M. Tian, T. Liu, K. Long, P. Li, and Y. Rong, “Optomechanical analysis and performance optimization of large-aperture KDP frequency converter,” Opt. Laser Technol. 109, 633–642 (2019).
[Crossref]

Opt. Mater. Express (3)

Philos. Trans. R. Soc., A (1)

J. Stolz Christopher, “The National Ignition Facility: the path to a carbon-free energy future,” Philos. Trans. R. Soc., A 370(1973), 4115–4129 (2012).
[Crossref]

Precis. Eng. (1)

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

Proc. CIRP (1)

Q. Liu, J. Cheng, Y. Xiao, H. Yang, and M. Chen, “Effect of milling modes on surface integrity of KDP crystal processed by micro ball-end milling,” Proc. CIRP 71, 260–266 (2018).
[Crossref]

Proc. Inst. Mech. Eng., Part B (1)

Y. Cai, Z. Liu, Z. Shi, Q. Song, and Y. Wan, “Optimum end milling tool path and machining parameters for micro Laval nozzle manufacturing,” Proc. Inst. Mech. Eng., Part B 231(10), 1703–1712 (2017).
[Crossref]

Proc. SPIE (3)

J. Cheng, H. Yang, Q. Liu, M. Chen, W. Ma, J. Tan, C. An, and Z. Liu, “Development of optimal mitigation contours and their machining flow by micro-milling to improve the laser damage resistance of KDP crystal,” Proc. SPIE 10447, 57 (2017)..
[Crossref]

P. Geraghty, W. Carr, V. Draggoo, R. Hackel, C. Mailhiot, and M. Norton, “Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micro-machining ball end mill contouring,” Proc. SPIE 6403, 64030Q (2007)..
[Crossref]

L. W. Hrubesh, R. M. Brusasco, W. Grundler, M. A. Norton, E. E. Donohue, W. A. Molander, S. L. Thompson, S. R. Strodtbeck, P. K. Whitman, M. D. Shirk, P. J. Wegner, M. C. Nostrand, and A. K. Burnham, “Methods for mitigating growth of laser-initiated surface damage on DKDP optics at 351 nm,” Proc. SPIE 4932, 180 (2003)..
[Crossref]

Other (1)

M. Q. Li, “Study on influence of KDP crystal ultra-precision fly-cutting micro/nano-topography on its laser induced damage threshold,” Harbin: Harbin Institute of Technology41–47 (2013).

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Figures (16)

Fig. 1.
Fig. 1. Images of machining equipment: (a) the micro-milling sub-system; (b) the micro ball-end milling cutter.

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Fig. 2.
Fig. 2. Schematic of the laser system designed to test the LIDTs of micro-milled KDP surfaces [36].

Download Full Size | PPT Slide | PDF

Fig. 3.
Fig. 3. Schematic of the generation process of tool marks in the micro ball-end milling repair process of KDP optics.

Download Full Size | PPT Slide | PDF

Fig. 4.
Fig. 4. Morphologies of repaired conical contour measured by optical profiler (a) and tool marks measured by AFM (b) an SEM (c). (d) is the cross-section profile of tool marks extracted from (b).

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Fig. 5.
Fig. 5. Illustration of ball-end milling cutter geometry (a)–(c) and the cutter movement in the workpiece coordinate system.

Download Full Size | PPT Slide | PDF

Fig. 6.
Fig. 6. The milling path in layer-milling (a) and spiral-milling process (b).

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Fig. 7.
Fig. 7. Illustration of the calculation of tool marks on micro-milled mitigation contours.

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Fig. 8.
Fig. 8. The schematic of the FEM model for simulating the EM fields caused by residual tool marks on micro-milled mitigation contours

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Fig. 9.
Fig. 9. Simulation results of conical mitigation contours processed by layer-milling (a) and spiral-milling (b), respectively. (c) shows the tool marks profiles extracted from (a) and (b).

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Fig. 10.
Fig. 10. The comparison of simulation and experiments results: (a) surface roughness (Ra) and residual height of tool marks (H); (b) the simulated tool marks morphology; (c) the measured tool marks morphology.

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Fig. 11.
Fig. 11. The calculated light intensification IRmax induced by tool marks generated in different milling strategies. The path intervals used in the spiral-milling process are in the range from 5 µm to 30 µm in the step of 5 µm.

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Fig. 12.
Fig. 12. The internal distributions of light intensity modulation induced by spiral-milled tool marks with path intervals of 10 µm (a, b) and 30 µm (c, d). (a) and (c)is in case of tool marks on KDP front-surface; (b) and (d) are in case of tool marks on KDP rear-surface.

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Fig. 13.
Fig. 13. The internal distributions of light intensity modulation induced by layer-milled tool marks: (a) tool marks on KDP front-surface; (b) tool marks on KDP rear-surface.

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Fig. 14.
Fig. 14. Experimentally measured optical transmittance (T) of repaired KDP surfaces by layer-milling and spiral milling processes. The error bar is the standard deviation of the measured data.

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Fig. 15.
Fig. 15. The measured laser-induced damage threshold (LIDT) of repaired KDP surfaces with different types of tool marks.

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Fig. 16.
Fig. 16. Morphologies of micro-milled KDP surfaces when laser damage took place: (a) repaired surface by the layer-milling path; (b) repaired surface by the spiral-milling path with path intervals of 10 µm. The applied laser fluences are 50.9 J/cm2 and 72.1 J/cm2, respectively.

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Tables (2)

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Table 1. Parameters applied in micro-milling mitigation contours on KDP surfaces.

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Table 2. Parameters applied in light intensification simulation models.

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Equations (10)

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{ x i = R i ⋅ sin ⁡ β i ⋅ cos ⁡ α i y i = R i ⋅ sin ⁡ β i ⋅ sin ⁡ α i z i = − R i ⋅ cos ⁡ β i
{ x t y t z t 1 } = { 1 f x t 1 f y t 1 f z t 1 } { x 0 y 0 z 0 1 } + { R ⋅ sin ⁡ β ⋅ cos ⁡ α i R ⋅ sin ⁡ β ⋅ cos ⁡ α i − R ⋅ cos ⁡ β 1 }
{ x t y t z t 1 } = { 1 f x t 1 f y t 1 f z t 1 } { x 0 y 0 z 0 1 } + { 1 cos ⁡ β x − sin ⁡ β y sin ⁡ β x cos ⁡ β x 1 } { cos ⁡ β y sin ⁡ β y 1 sin ⁡ β y cos ⁡ β y 1 } { R ⋅ sin ⁡ β ⋅ cos ⁡ α i R ⋅ sin ⁡ β ⋅ cos ⁡ α i − R ⋅ cos ⁡ β 1 }
{ △ s ≥ ( R ω + f ) ⋅ △ t △ s ≥ R △ β
h = A C ¯ = A B max ¯ sin ⁡ ( γ )
R a = 1 l ∫ 0 l A i B i d x
∇ × ( ∇ × E ) − κ 2 ε r E = 0
∂ ∂ x ( 1 μ r ∂ E z ∂ x ) + ∂ ∂ y ( 1 μ r ∂ E z ∂ y ) + k 0 2 ε r E z = 0
I = 1 2 R E [ E × H ∗ ] = 1 2 ε μ | E | 2
I R max = I max I 0

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