Add to BibSonomy
Abstract
The effect of optical thickness in a bismuth water-window soft x-ray source is considered by comparing the emission from laser-produced plasmas of a 7.5% atomic density foam target and a solid-density target. The number of photons recorded in the 4 nm region was comparable for both targets at a plasma-initiating laser pulse duration of 6 ns. From experiments at different pulse durations of 150 ps and 6 ns, self-absorption (opacity) effects were found to be relatively small for bismuth plasmas as compared to those of tin, based on the same emission mechanism and which are used in 13.5 nm sources for extreme ultraviolet lithography.
© 2018 Optical Society of America
Full Article | PDF ArticleMore Like This
Goki Arai, Hiroyuki Hara, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Hayato Ohashi, Shinichi Namba, Atsushi Sunahara, Akira Sasaki, Masaharu Nishikino, Gerry O’Sullivan, and Takeshi Higashiguchi
Opt. Express 26(21) 27748-27756 (2018)
Toshiki Tamura, Goki Arai, Yoshiki Kondo, Hiroyuki Hara, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Chihiro Suzuki, Gerry O’Sullivan, and Takeshi Higashiguchi
Opt. Lett. 43(9) 2042-2045 (2018)
Christian John, Maki Kishimoto, Tomoyuki Johzaki, Takeshi Higashiguchi, Noboru Kakunaka, Yasuhiro Matsumoto, Noboru Hasegawa, Masaharu Nishikino, Takeo Ejima, Atsushi Sunahara, Takuma Endo, and Shinichi Namba
Opt. Lett. 44(6) 1439-1442 (2019)