Abstract

Amplitude and phase of both in-plane and out-of-plane vibration components are measured in real time using heterodyne speckle interferometry. Microvibrations with amplitudes down to 1 nm and frequencies up to 5 MHz were analyzed at a spatial resolution of 35 μm. Amplitude and phase measurements were performed with an accuracy of better than 6% and 4°, respectively. This permits complete determination of the mechanical movement of a vibrating surface.

© 1983 Optical Society of America

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