Abstract

Tunable coherent radiation in the vicinity of 64 nm has been produced by third-harmonic generation of the output of an ultrahigh-spectral-brightness ArF* source in various simple gaseous media. The following performance parameters of the ArF* system are used: pulse energy, ~300 mJ; pulse duration, ~7 nsec; spectral width, <260 MHz; beam divergence, ~5 μrad × 15 μrad; and repetition rate up to 10 Hz. Third-harmonic generation with peak powers up to 30 W has been observed in an apparatus that eliminates photoabsorption of the third harmonic in the differential pumping stages.

© 1982 Optical Society of America

Generation of high-spectral-brightness tunable XUV radiation at 83 nm

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